Gas exhaust apparatus and intake line automatic closing apparatus used for gas exhaust apparatus
AssigneeSemes Co., Ltd.
InventorsJehyoung Lee, Joon Hwan Jang, Shi Hyun Park, Inhwang Park
Life of this patent
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Abstract
Provided is a gas exhaust apparatus for expelling a gas in a treatment space of a wafer treatment apparatus to outside, the gas exhaust apparatus including a main exhaust line connected to the treatment space, and an auxiliary exhaust line having an end connected to the main exhaust line to supply an external air current to the main exhaust line, wherein an automatic closer is disposed at another end of the auxiliary exhaust line to close the other end of the auxiliary exhaust line in a specific situation.
Claims15
An automatic closing apparatus for closing an intake line in a specific situation, the automatic closing apparatus comprises:
- a body connected to the intake line and having an opening;
- a sealer connected onto the body and having a hollow part;
- a cover mounted to be vertically movable on the sealer to open or close the opening;
- and
- a driver connected to the cover to vertically drive the cover,
- wherein the driver comprises:
- a power unit providing a driving force for vertical driving of the cover;
- a driving shaft connected to the cover to vertically drive the cover;
- and
- a plurality of support shafts mounted on the sealer to pass through support holes of the cover,
- wherein the specific situation comprises a situation in which power supply to the automatic closing apparatus is cut off, and
- wherein, in the specific situation, the cover falls by its own weight to close the opening.
A gas exhaust apparatus for expelling a gas in a treatment space of a wafer treatment apparatus to outside, the gas exhaust apparatus comprising:
- a main exhaust line connected to the treatment space;
- an auxiliary exhaust line having a first end connected to the main exhaust line to supply an external air current to the main exhaust line;
- and
- an automatic closer disposed at a second end of the auxiliary exhaust line, opposite to the first end,
- wherein the automatic closer includes:
- a body connected to the auxiliary exhaust line and having an opening;
- a sealer connected onto the body and having a hollow part;
- a cover mounted to be vertically movable on the sealer to open or close the opening;
- and
- a driver connected to the cover to vertically drive the cover, and
- wherein, in a situation in which power supply to the automatic closer is cut off, to prevent the gas to be expelled through the main exhaust line to the outside from leaking through the second end of the auxiliary exhaust line, the cover falls by its own weight to close the opening so as to close the second end of the auxiliary exhaust line.
A gas exhaust apparatus for expelling a gas in a treatment space of a wafer treatment apparatus to outside, the gas exhaust apparatus comprising:
- a main exhaust line connected to the treatment space;
- an auxiliary exhaust line having a first end connected to the main exhaust line to supply an external air current to the main exhaust line;
- and
- an automatic closer connected to a second end, opposite to the first end, of the auxiliary exhaust line and configured to close the second end of the auxiliary exhaust line in a specific situation,
- wherein the automatic closer comprises:
- a body connected to the auxiliary exhaust line and having an opening;
- a sealer connected onto the body and having a hollow part;
- a cover mounted to be vertically movable on the sealer to open or close the opening;
- and
- a driver connected to the cover to vertically drive the cover,
- wherein the specific situation comprises a situation in which power supply to the automatic closer is cut off, and
- wherein, in the specific situation, the cover falls by its own weight to close the opening.
A gas exhaust apparatus for expelling a gas in a treatment space of a wafer treatment apparatus to outside, the gas exhaust apparatus comprising:
- a main exhaust line connected to the treatment space;
- an auxiliary exhaust line having a first end connected to the main exhaust line to supply an external air current to the main exhaust line;
- and
- an automatic closer connected to a second end, opposite to the first end, of the auxiliary exhaust line and configured to close the second end of the auxiliary exhaust line in a specific situation,
- wherein the automatic closer comprises:
- a body connected to the auxiliary exhaust line and having an opening;
- a sealer connected onto the body and having a hollow part;
- a cover mounted to be vertically movable on the sealer to open or close the opening;
- and
- a driver connected to the cover to vertically drive the cover,
- wherein the automatic closer comprises a plurality of bodies,
- wherein the plurality of bodies have a plurality of openings, and
- wherein the sealer is provided on the plurality of bodies to integrally connect the plurality of bodies.
A gas exhaust apparatus for expelling a gas in a treatment space of a wafer treatment apparatus to outside, the gas exhaust apparatus comprising:
- a main exhaust line connected to the treatment space;
- an auxiliary exhaust line having a first end connected to the main exhaust line to supply an external air current to the main exhaust line;
- and
- an automatic closer connected to a second end, opposite to the first end, of the auxiliary exhaust line and configured to close the second end of the auxiliary exhaust line in a specific situation,
- wherein the automatic closer comprises:
- a body connected to the auxiliary exhaust line and having an opening;
- a sealer connected onto the body and having a hollow part;
- a cover mounted to be vertically movable on the sealer to open or close the opening;
- and
- a driver connected to the cover to vertically drive the cover, and
- wherein the driver comprises:
- a power unit providing a driving force for vertical driving of the cover;
- a driving shaft connected to the cover to vertically drive the cover;
- and
- support shafts mounted on the sealer to pass through support holes of the cover.
Dependencies are inferred from the claim text.