Gate valve, substrate processing apparatus, and substrate processing method

A gate valve having a first face configured to face a depressurizable vacuum processing chamber and a second face configured to face a depressurizable vacuum preliminary chamber, the vacuum processing chamber and the vacuum preliminary chamber each having a substrate loading/unloading port and an annular sealing member surrounding an entire circumference of the substrate loading/unloading port, the first and second faces being configured to abut on the annular sealing members, the substrate loading/unloading ports being disposed facing each other, the gate valve being configured to openably and closably connect the vacuum processing chamber and the vacuum preliminary chamber, the gate valve comprising:

• sealing channels, wherein the annular sealing member of at least one of the vacuum processing chamber and the vacuum preliminary chamber includes a first inner sealing member and a first outer sealing member surrounding the entire circumference of the substrate loading/unloading port of the at least one of the vacuum processing chamber or the vacuum preliminary chamber, the first outer sealing member being closer to an exterior of the gate valve than the first inner sealing member, the sealing channels being provided between the first inner and outer sealing members, and between a second inner sealing member and a second outer sealing member arranged in one or more parts inside the gate valve, the second outer sealing member being closer to an exterior of the gate valve than the second inner sealing member;
• and
• a gas circulation channel including a plurality of the sealing channels and being configured to guide inert gas so that the inert gas continuously flows from an inlet to an outlet for the inert gas,
• wherein the first inner and outer sealing members are arranged so as to surround the entire circumference of the substrate loading/unloading port of the vacuum preliminary chamber, and the sealing channel between the first inner and outer sealing members has a gas feeding-out port through which inert gas is fed out to a sealing part inside the vacuum preliminary chamber, and a gas receiving port through which the inert gas returned from the sealing part inside the vacuum preliminary chamber is received.

A substrate processing apparatus comprising:

• a depressurizable vacuum processing chamber having a substrate loading/unloading port and an annular sealing member surrounding an entire circumference of the substrate loading/unloading port;
• a depressurizable vacuum preliminary chamber having a substrate loading/unloading port and an annular sealing member surrounding an entire circumference of the substrate loading/unloading port, the substrate loading/unloading port of the vacuum preliminary chamber being disposed so as to face the substrate loading/unloading port of the vacuum processing chamber;
• and
• a gate valve having a first face facing the vacuum processing chamber and a second face facing the vacuum preliminary chamber, each of the first and second faces abutting on the annular sealing members of the vacuum processing chamber and the vacuum preliminary chamber, the annular sealing member of at least one of the vacuum processing chamber or and the vacuum preliminary chamber includes a first inner sealing member and a first outer sealing member surrounding the entire circumference of the substrate loading/unloading port of the at least one of the vacuum processing chamber or the vacuum preliminary chamber, the first outer sealing member being closer to an exterior of the gate valve than the first inner sealing member, the gate valve openably and closably connecting the vacuum processing chamber and the vacuum preliminary chamber, wherein
• the gate valve includes sealing channels between the first inner and outer sealing members, and between a second inner sealing member and a second outer sealing member arranged in one or more parts inside the gate valve, and a gas circulation channel including a plurality of the sealing channels and extending from an inlet, through which inert gas flows from an outside of the gate valve, to an outlet through which inert gas flows to the outside of the gate valve, the gas circulation channel being configured to flow inert gas continuously from the inlet to the outlet.

A substrate processing method for processing a substrate in a depressurizable vacuum processing chamber of a substrate processing apparatus by loading the substrate into and unloading the substrate from the vacuum processing chamber through a gate valve of the substrate processing apparatus,

• wherein the vacuum processing chamber has a substrate loading/unloading port and an annular sealing member surrounding an entire circumference of the substrate loading/unloading port,
• wherein the substrate processing apparatus includes a depressurizable vacuum preliminary chamber having a substrate loading/unloading port and an annular sealing member surrounding an entire circumference of the substrate loading/unloading port, the substrate loading/unloading port of the vacuum preliminary chamber being disposed so as to face the substrate loading/unloading port of the vacuum processing chamber,
• wherein the gate valve has a first face facing the vacuum processing chamber and a second face facing the vacuum preliminary chamber, each of the first and second faces abutting on the annular sealing members of the vacuum processing chamber and the vacuum preliminary chamber, the annular sealing member of at least one of the vacuum processing chamber and the vacuum preliminary chamber includes a first inner sealing member and a first outer sealing member surrounding the entire circumference of the substrate loading/unloading port of the at least one of the vacuum processing chamber or the vacuum preliminary chamber, the first outer sealing member being closer to an exterior of the gate valve than the first inner sealing member, the gate valve openably and closably connecting the vacuum processing chamber and the vacuum preliminary chamber,
• wherein the gate valve includes sealing channels between the first inner and outer sealing members, and between a second inner sealing member and a second outer sealing member arranged in one or more parts inside the gate valve, and a gas circulation channel including a plurality of the sealing channels and extending from an inlet, through which inert gas flows from an outside of the gate valve, to an outlet through which inert gas flows to the outside of the gate valve, the gas circulation channel being configured to flow inert gas continuously from the inlet to the outlet, the method comprising:
• depressurizing the vacuum processing chamber or the vacuum preliminary chamber in a state in which inert gas flows continuously through the gas circulation channel, from the inlet to the outlet, or in a state in which the gas circulation channel is evacuated.