# US 12,601,043 B2 · Mask device and evaporation device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,601,043 B2 - Document ID: US12601043B2 - Status: Granted - Kind: B2 - Application number: 18/524,974 - Filed: 2023-11-30 - Published: 2024-03-21 - Granted: 2026-04-14 - Earliest claimed: 2017-09-08 - Assignees: Wuhan Tianma Micro-Electronics Co., Ltd.; Wuhan Tianma Micro-Electronics Co., Ltd. Shanghai Branch - Applicants: Wuhan Tianma Micro-Electronics Co., Ltd.; Wuhan Tianma Micro-Electronics Co., Ltd. Shanghai Branch - Inventors: Naichao Mu; Yuan Li; Yu Xin; Jun Ma; Lijing Han - Web page: https://patentgrep.com/patent/US12601043B2 ## CPC - C23C 14/042: {using masks} - C23C 14/12: Organic material - H10K 71/166: {using selective deposition, e.g. using a mask} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract A mask module includes a framework and a first strip plate fixed on the framework and extending along a first direction. The first strip plate is provided with a first concave-convex structure on one side edge along the first direction. At least one convex structure is provided in a middle of the first concave-convex structure along the first direction. The convex structure and the first stripe plate are integrally formed. ## Claims ### Claim 1 A mask module, comprising: a framework; and at least one first strip plate fixed on the framework and extending along a first direction, wherein: the at least one first strip plate is provided with at least one first concave-convex structure on one side edge of the at least one first strip plate along the first direction; at least one raised structure is provided only in a middle position of one of the at least one first concave-convex structure on the one side edge of the at least one first strip plate along the first direction; and the at least one raised structure and the at least one first strip plate are integrally formed. ### Claim 2 (depends on 1) The mask module of claim 1, wherein: the at least one first strip plate includes a first area and a second area; and in a second direction parallel to a contact surface of the at least one first strip plate and the frame and perpendicular to the first direction, a width of the first area is greater than a width of the second area. ### Claim 3 (depends on 1) The mask module of claim 1, wherein: at least one second concave-convex structure is provided on another side edge of the at least one first strip plate. ### Claim 4 (depends on 1) The mask module of claim 1, further comprising at least one second strip plate fixed on the framework, wherein: the at least one second strip plate extends along a second direction, and the first direction intersects with the second direction; and at least one third concave-convex structure is provided on a side edge of the at least one second strip plate along the second direction. ### Claim 5 (depends on 4) The mask module of claim 4, wherein the at least one second strip plate includes a third area and a fourth area, a width of the third area being greater than a width of the fourth area in a direction parallel to a surface of the at least one second strip plate and perpendicular to the second direction. ### Claim 6 (depends on 4) The mask module of claim 4, wherein: at least one fourth concave-convex structure is provided on another side edge of the at least one second strip plate. ### Claim 7 (depends on 6) The mask module of claim 6, wherein the at least one third concave-convex structure and the at least one fourth concave-convex structure have different patterns. ### Claim 8 (depends on 4) The mask module of claim 4, wherein the at least one first strip plate includes a plurality of first strip plates and the at least one second strip plate includes a plurality of second strip plates, wherein: the plurality of first strip plates and the plurality of second strip plates intersect with each other to define a plurality of areas. ### Claim 9 (depends on 4) The mask module of claim 4, wherein the at least one first strip plate and the at least one second strip plate are formed integrally. ### Claim 10 (depends on 1) The mask module of claim 1, wherein the one of the at least one first concave-convex structure includes an arc-shaped structure at two ends of the one of the at least one first concave-convex structure along the first direction. ### Claim 11 (depends on 10) The mask module of claim 10, wherein the arc-shaped structure is a concave arc structure. ### Claim 12 (depends on 1) The mask module of claim 1, wherein the at least one raised structure includes an arc-shaped structure at two ends of the at least one raised structure along the first direction. ### Claim 13 (depends on 1) The mask module of claim 1, wherein: the at least one raised structure is symmetrical along a first axis of symmetry in a second direction; the one of the at least one first concave-convex structure is symmetrical along a second axis of symmetry in the second direction; and the first direction intersects with the second direction. ### Claim 14 (depends on 13) The mask module of claim 13, wherein the first axis of symmetry coincides with the second axis of symmetry. ### Claim 15 (depends on 1) The mask module of claim 1, wherein the at least one raised structure includes two raised structures with different dimensions. ### Claim 16 (depends on 1) The mask module of claim 1, wherein the at least one raised structure and the at least one first strip plate are made of a same material. ### Claim 17 An evaporation device, comprising an evaporation source; and a mask module including: a framework; and at least one first strip plate fixed on the framework and extending along a first direction; wherein: the at least one first strip plate is provided with at least one first concave-convex structure on one side edge of the at least one first strip plate along the first direction; at least one raised structure is provided only in a middle position of one of the at least one first concave-convex structure on the one side edge of the at least one first strip plate along the first direction; the at least one raised structure and the at least one first strip plate are integrally formed; and the evaporation source sends evaporation substances towards the mask module, and the evaporation substances are evaporated to evaporation targets through the mask module. ### Claim 18 (depends on 17) The evaporation device of claim 17, wherein: the at least one first strip plate includes a first area and a second area; and in a second direction parallel to a contact surface of the at least one first strip plate and the frame and perpendicular to the first direction, a width of the first area is greater than a width of the second area. ### Claim 19 (depends on 17) The evaporation device of claim 17, wherein: at least one second concave-convex structure is provided on another side edge of the at least one first strip plate. ### Claim 20 A mask module, comprising: a framework; and at least one first strip plate fixed on the framework and extending along a first direction, wherein: the at least one first strip plate is provided with at least one first concave-convex structure on one side edge of the at least one first strip plate along the first direction; at least one raised structure is provided only in a middle position of one of the at least one first concave-convex structure on the one side edge of the at least one first strip plate along the first direction; and a width of the first concave-convex structure in a second direction is greater than a width of the at least one raised structure in the second direction, wherein the second direction is perpendicular to the first direction.