# US 12,601,041 B2 · Mask, mask structure and method for manufacturing mask

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- Number: US 12,601,041 B2
- Document ID: US12601041B2
- Status: Granted
- Kind: B2
- Application number: 17/780,714
- Filed: 2021-05-12
- Published: 2023-11-09
- Granted: 2026-04-14
- Earliest claimed: 2020-06-24
- Assignees: Chengdu Boe Optoelectronics Technology Co., Ltd.; Boe Technology Group Co., Ltd.
- Applicants: Chengdu BOE Optoelectronics Technology Co., Ltd.; BOE Technology Group Co., Ltd.
- Inventors: Dengjun Guo; Junji Zhou; Bowen Yang; Wenchang Zhang; Chao Ma; Qingfeng Wu; Xiaolong Luo; Zhilin Du; Yingdong Shi; Shuowen Yi; Wenxu Lv
- Web page: https://patentgrep.com/patent/US12601041B2

## CPC

- C23C 14/042: {using masks}
- C23C 14/24: Vacuum evaporation
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

Provided is a mask, which includes: a mask body, including a plurality of grooves, wherein the plurality of grooves are distributed at intervals on a first surface of the mask body, and a hollowed-out structure is provided in the groove; and a mask strip disposed on the mask body, wherein a pattern region of the mask strip is within an orthographic projection of the groove on the first surface.

## Claims

### Claim 1

A mask, comprising:
a mask body, comprising a plurality of grooves, wherein the plurality of grooves are distributed at intervals on a first surface of the mask body, and a hollowed-out structure is provided in the plurality of grooves; and
a plurality of mask strips disposed on the mask body, wherein each of the plurality of mask strips is completely mounted in each of the plurality of grooves, an orthographic projection of each of the plurality of mask strips on the first surface is within an orthographic projection of each of the plurality of grooves on the first surface, a welding region of the mask strip is welded to the mask body within the groove, in a direction perpendicular to the first surface, a depth of each of the plurality of grooves is greater than a thickness of the mask strip, a substrate is disposed on the first surface of the mask body, and the mask strip is not in contact with the substrate.

### Claim 2 (depends on 1)

The mask according to claim 1, wherein a width of the plurality of grooves is greater than a width of the mask strip.

### Claim 3 (depends on 2)

The mask according to claim 2, wherein a difference value between the width of the plurality of grooves and the width of the mask strip ranges from 1 μm to 5 μm.

### Claim 4 (depends on 1)

The mask according to claim 1, wherein a length of the plurality of grooves is smaller than a length of the mask strip.

### Claim 5 (depends on 4)

The mask according to claim 4, wherein a difference value between the length of the plurality of grooves and the length of the mask strip ranges from 1 μm to 5 μm.

### Claim 6 (depends on 1)

The mask according to claim 1, wherein a difference value between the depth of the plurality of grooves and the thickness of the mask strip ranges from 5 μm to 15 μm.

### Claim 7 (depends on 1)

The mask according to claim 1, wherein an opening area of the hollowed-out structure is a rectangular opening area, a length of the rectangular opening area ranging from 150 mm to 160 mm and a width of the rectangular opening area ranging from 70 mm to 80 mm.

### Claim 8 (depends on 1)

The mask according to claim 1, wherein one hollowed-out structure is provided in each of the plurality of grooves.

### Claim 9 (depends on 1)

The mask according to claim 1, wherein two hollowed-out structures are provided in each of the plurality of grooves.

### Claim 10 (depends on 1)

The mask according to claim 1, wherein the mask body is an iron-nickel alloy mask body or a stainless steel mask body.

### Claim 11

A mask structure, comprising:
a mask frame, provided with an opening; and wherein
the mask comprises:
a mask body, comprising a plurality of grooves, wherein the plurality of grooves are distributed at intervals on a first surface of the mask body, and a hollowed-out structure is provided in the plurality of grooves;
a plurality of mask strips disposed on the mask body, wherein each of the plurality of mask strips is completely mounted in each of the plurality of grooves, an orthographic projection of each of the plurality of mask strips on the first surface is within an orthographic projection of each of the plurality of grooves on the first surface, a welding region of the mask strip is welded to the mask body within the groove, in a direction perpendicular to the first surface, a depth of each of the plurality of grooves is greater than a thickness of the mask strip, and a substrate is disposed on the first surface of the mask body, and the mask strip is not in contact with the substrate; and
the mask is disposed on the mask frame.

### Claim 12

A method for manufacturing a mask, comprising:
forming a plurality of grooves and a plurality of hollowed-out structures on a first surface of a metal plate to acquire a mask body, wherein the hollowed-out structure is provided in each of the plurality of grooves; and
welding a plurality of mask strips to the mask body, wherein each of the plurality of mask strips is completely mounted in each of the plurality of grooves, an orthographic projection of each of the plurality of mask strips on the first surface is within an orthographic projection of each of the plurality of grooves on the first surface, a welding region of the mask strip is welded to the mask body within the groove, in a direction perpendicular to the first surface, a depth of each of the plurality of grooves is greater than a thickness of the mask strip, a substrate is disposed on the first surface of the mask body, and the mask strip is not in contact with the substrate.

### Claim 13 (depends on 12)

The method according to claim 12, wherein forming the plurality of grooves and the plurality of hollowed-out structures on the first surface of the metal plate comprises:
forming the plurality of hollowed-out structures on the first surface of the metal plate; and
forming a step at an edge of each of the hollowed-out structures to acquire the plurality of grooves.

### Claim 14 (depends on 12)

The method according to claim 12, wherein forming the plurality of grooves and the plurality of hollowed-out structures on the first surface of the metal plate comprises:
forming the plurality of grooves on the first surface of the metal plate; and
manufacturing the hollowed-out structures in the plurality of grooves.

### Claim 15 (depends on 11)

The mask structure according to claim 11, wherein a width of the plurality of grooves is greater than a width of the mask strip.

### Claim 16 (depends on 11)

The mask structure according to claim 11, wherein a length of the plurality of grooves is smaller than a length of the mask strip.

### Claim 17 (depends on 11)

The mask structure according to claim 11, wherein one hollowed-out structure is provided in each of the plurality of grooves.

### Claim 18 (depends on 11)

The mask structure according to claim 11, wherein two hollowed-out structures are provided in each of the plurality of grooves.
