A method for preparing a stainless steel seamless tube for an integrated circuit and an IC industry preparation device, comprising the following steps:
- a:
- a stainless steel refining process:
- with 316L stainless steel as a base material, adding alloys into an Electric Arc Furnace (EAF) for primary smelting and hot metal pretreatment including S removal, Si removal and P removal to reduce the content of S, Si, P and C in hot metal to prepare stainless steel pre-melt;
- performing oxygen pre-blowing and boiling decarburization on the stainless steel pre-melt in a K-OBM-converter to make the content of C in a slag system less than or equal to 0.9 mass %;
- next, performing Vacuum Oxygen Decarburization (VOD) refining to make the content of Al less than or equal to 0.03 mass % and the content of oxygen less than or equal to 0.0030 mass %;
- then, performing Ladle Furnace (LF) refining to control the content of Al in the steel to 0.012%-0.018 mass %, the content of oxygen in the steel to 0.0011%-0.0020 mass % and the content of H in the steel to 0.0005 mass %-0.0010 mass %, to make non-metallic inclusions in molten steel refined and distributed dispersively;
- b:
- a vacuum induction melting and vacuum consumable remelting process:
- removing C, O, and H in the molten steel through vacuum induction melting to reduce the solubility of O and H in the molten steel, removing compounds formed by Mo, Ca, C, Al, P, S, Si, and As in the molten steel by floating with slag, and then performing casting to obtain a steel ingot;
- using the steel ingot as an electrode for vacuum consumable remelting, further purifying the molten steel in the process of melting the electrode to form liquid drops, and washing and solidifying the slag, to make the content of ferrite less than or equal to 0.5 volume %, the content of H less than or equal to 0.0002 mass % and the content of O less than or equal to 0.0015 mass %;
- c:
- a stainless steel forging process:
- preparing round billets through steel ingot forging and continuous steel bar rolling;
- d:
- a hot piercing process:
- performing hot piercing on the round billets to produce pierced billets;
- e:
- a cold working process:
- performing intermediate cold working and finish-rolling cold working to obtain a plurality of stainless steel seamless tubes;
- f:
- an inner bore electrolytic polishing, pickling and passivation process:
- hanging the stainless steel seamless tubes prepared in Step e on a customized fixture, using a stainless steel tube in an electrolytic cell as an electrolytic anode, performing heating through an electrical heating rod, controlling the temperature of acid liquor to 43° C.-70° C., a DC multi-pulse voltage to be lower than or equal to 30V and a current density to 5-50 A/dm, and stirring a resulting electrolytic polishing solution for convection to decrease a temperature difference of an electrolyte to prevent the anode from being overheated, wherein the electrolytic polishing time is 5-15 min;
- after polishing is finished, performing pickling and passivation, and removing free iron ions on a surface of each stainless steel seamless tube to form a chromium-rich layer on the surface to improve corrosion resistance;
- and
- g:
- a cleaning process:
- degreasing and cleaning the plurality of stainless steel seamless tube prepared in Step f, wherein vibration cleaning is performed on the stainless steel seamless tubes first with ultrasonic waves and a cleaning agent, inner bores of the stainless steel seamless tubes are washed one by one by means of a circulating water spray lance after the stainless steel seamless tubes are cleaned, outer surfaces of the stainless steel seamless tubes are sprayed to be rinsed, water from the circulating water spray lance is controlled at a temperature of 60° C.±5° C., water on the surfaces of the stainless steel seamless tubes drains off, and inner walls of the tubes are purged one by one to remove water;
- then, the stainless steel seamless tubes are cleaned by means of an ultrasonic cleaning machine using pure water as cleaning water, the inner bores of the tubes are washed with water for 1-5 min, the outer surfaces of the tubes are rinsed for 3-5 min, then water on the outer surfaces drains off, the interior of each tube is purged with compressed air to remove water, and finally, stainless steel seamless tubes are obtained.