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US 12,600,829 B2Granted
Sublimable film formation composition and method for producing substrate
AssigneeCentral Glass Company, Limited
InventorsYoshiharu Terui, Soichi Kumon, Yuki Fukui
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Abstract
The sublimable film formation composition of the present invention includes a sublimable substance and a solvent in which a saturation solubility of the sublimable substance is more than 10% by mass.
Claims11
A sublimable film formation composition comprising:
- a sublimable substance;
- and
- a solvent A1 in which a saturation solubility of the sublimable substance is 76% by mass or more and a boiling point is lower by 5° C. or more than a boiling point of the sublimable substance at 1 atm.
Dependencies are inferred from the claim text.