Monolithic substrate support having porous features and methods of forming the same
AssigneeApplied Materials, Inc.
InventorsArvinder Manmohan Singh Chadha, Christopher Beaudry
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Abstract
A method of forming a substrate support for use in a processing chamber includes forming a porous region in each of a plurality of ceramic green sheets, stacking the plurality of ceramic green sheets, each having the porous region formed therein, to form a ceramic laminate, and sintering the ceramic laminate to form a monolithic ceramic body having a porous plug formed therein. The porous plug includes the porous regions in the plurality of ceramic green sheets that are sintered.
Claims11
A method of forming a substrate support for use in a processing chamber, the method comprising:
- micro-machining holes through each of a plurality of ceramic green sheets in a first direction, wherein each hole in each of the plurality of ceramic green sheets extends in the first direction;
- forming a ceramic laminate by stacking the plurality of ceramic green sheets, wherein an un-filled hole in each of the plurality of ceramic green sheets is connected to an un-filled hole in an adjacent ceramic green sheet of the plurality of ceramic green sheets in the first direction;
- and
- forming a monolithic ceramic body by sintering the ceramic laminate.
A method of forming a substrate support for use in a processing chamber, the method comprising:
- micro-machining first holes through a first dielectric body in a first direction, first recesses in a first surface of the first dielectric body, second holes through a second dielectric body in the first direction, and second recesses in a second surface of the second dielectric body;
- and
- aligning each of the first recesses with a respective one of the second recesses, and each of the first holes with a respective one of the second holes, and bonding the first dielectric body and the second dielectric body.
Dependencies are inferred from the claim text.