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US 12,600,159 B2Granted
Reusable composite stencil for spray processes
AssigneeIntel Corporation
InventorsFeras Eid, Wenhao Li, Jiraporn Seangatith, Paul Diglio, Xavier Brun
Life of this patent
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Abstract
Reusable composite stencils for spray processes, particularly for spray processes used in the fabrication of integrated circuit devices, may be fabricated having a permanent core and at least one sacrificial material layer. Thus, in operation, when a predetermined amount of the sacrificial material layer has been ablated away by a material being sprayed in the spray process, the remaining sacrificial material layer may be removed and reapplied to its original thickness. Therefore, the permanent core, which is usually expensive and/or difficult to fabricate, may be repeatedly reused.
Claims20
An apparatus, comprising:
- a composite stencil, wherein the composite stencil includes at least one opening extending therethrough and wherein the composite stencil comprises:
- a permanent core, wherein the permanent core includes a first surface, an opposing second surface, and at least one opening extending from the first surface of the permanent core to the second surface of the permanent core;
- a first sacrificial material layer on the first surface of the permanent core, wherein the first sacrificial material layer has an outer surface opposite the first surface of the permanent core and at least one opening extending from the outer surface of the first sacrificial material layer to the at least one opening of the permanent core;
- and
- a second sacrificial material layer on the second surface of the permanent core, wherein the second sacrificial material layer has an outer surface opposite the second surface of the permanent core and at least one opening extending from the outer surface of the second sacrificial material layer to the at least one opening of the permanent core, and wherein the at least one opening in the permanent core, at least one corresponding opening in the first sacrificial material layer, and at least one corresponding opening in the second sacrificial material layer define the at least one opening in the composite stencil.
2 more elements
A composite stencil, comprising:
- a permanent core, wherein the permanent core comprises a first surface, an opposing second surface, and at least one opening extending from the first surface of the permanent core to the second surface of the permanent core;
- a first sacrificial material layer on the first surface of the permanent core, wherein the first sacrificial material layer has an outer surface opposite the first surface of the permanent core and at least one opening extending from the outer surface of the first sacrificial material layer to the at least one opening of the permanent core;
- and
- a second sacrificial material layer on the second surface of the permanent core, wherein the second sacrificial material layer has an outer surface opposite the second surface of the permanent core and at least one opening extending from the outer surface of the second sacrificial material layer to the at least one opening of the permanent core, and wherein the at least one opening in the permanent core, at least one corresponding opening in the first sacrificial material layer, and at least one corresponding opening in the second sacrificial material layer define at least one opening in the composite stencil extending therethrough.
1 more element
An apparatus, comprising:
- a composite stencil comprising an opening extending therethrough, the composite stencil comprising:
- a permanent core comprising a first surface, an opposing second surface, and an opening extending from the first surface of the permanent core to the second surface of the permanent core;
- a first sacrificial material layer on the first surface of the permanent core, wherein the first sacrificial material layer has an outer surface opposite the first surface of the permanent core and an opening extending from the outer surface of the first sacrificial material layer to the opening of the permanent core;
- and
- a second sacrificial material layer on the second surface of the permanent core, wherein the second sacrificial material layer has an outer surface opposite the second surface of the permanent core and an opening extending from the outer surface of the second sacrificial material layer to the opening of the permanent core, and wherein the opening in the permanent core, corresponding opening in the first sacrificial material layer, and corresponding opening in the second sacrificial material layer define the opening in the composite stencil.
2 more elements
Dependencies are inferred from the claim text.