# US 12,599,926 B2 · Home port and a substrate-treating apparatus for exhausting fume from a treatment liquid

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- Number: US 12,599,926 B2
- Document ID: US12599926B2
- Status: Granted
- Kind: B2
- Application number: 18/145,928
- Filed: 2022-12-23
- Published: 2023-06-29
- Granted: 2026-04-14
- Earliest claimed: 2021-12-24
- Assignees: Semes Co., Ltd.
- Applicants: Semes Co., Ltd.
- Inventors: Jong Won Moon; Kyung Hun Lee; Eun Hyeok Choi; Young Jin Kim
- Web page: https://patentgrep.com/patent/US12599926B2

## CPC

- B05C 11/1039: {Recovery of excess liquid or other fluent material; Controlling means therefor}
- H10P 72/0414: {using mainly spraying means, e.g. nozzles}
- B05B 15/58: preventing deposits, drying-out or blockage by recirculating the fluid to be sprayed from upstream of the discharge opening back to the supplying means {(B05B1/3093 takes precedence)}
- B05C 5/02: {the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g.} from an outlet device in contact or almost in contact, with the work
- B05C 5/027: {Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated (B05C5/0254 takes precedence)}
- H10P 72/3302: {Mechanical parts of transfer devices}
- B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D)

## Abstract

Provided is a home port in which a nozzle supplying a treating liquid to a substrate waits. The home port includes a drain cup, a housing provided to cover the drain cup and having an exhaust space exhausting a fume generated from the treating liquid, and an insertion body placed between an upper wall of the housing and the drain cup in the housing. A first exhaust passage guiding the fume to the exhaust space is formed between the insertion body and the drain cup, and a second exhaust passage guiding the fume to the exhaust space is formed between the insertion body and the housing.

## Claims

### Claim 1

An apparatus for treating a substrate, the apparatus comprising:
a liquid treating chamber configured to treat a substrate with a liquid;
a home port provided outside a treating unit of the liquid treating chamber; and
a nozzle unit supplying a treating liquid to a substrate positioned in the treating unit, and having a nozzle provided to be movable between a process location at which the treating unit performs the liquid-treating for the substrate and a waiting location of waiting in the home port,
wherein the home port includes:
a drain cup having an accommodation space accommodating the treating liquid ejected from the nozzle;
a housing provided to cover the drain cup and having an exhaust space which exhausts fumes generated from the treating liquid;
a first exhaust passage and a second exhaust passage through which the fumes generated from the treating liquid in the drain cup flows to the exhaust space are provided in the home port, wherein the second exhaust passage is positioned above the first exhaust passage; and
an insertion body having a through hole penetrated in a vertical direction,
wherein the insertion body has a body positioned to be spaced apart from an inner wall of the housing,
wherein the body is placed at a location higher than the drain cup and lower than the upper wall of the housing,
wherein a first clearance between the body and the drain cup is provided as the first exhaust passage, and
wherein a second clearance between the body and the upper wall of the housing is provided as the second exhaust passage.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the housing includes
a lower body covering a side portion and a lower portion of the drain cup, and
an upper body positioned above the lower body,
the insertion body further includes
a support base, and
connection rods connecting the body and the support base,
wherein an upper end of the lower body is positioned to be higher than an upper end of the drain cup,
wherein a bottom of the support base is supported by the lower body,
wherein the upper body is supported by the support base, and
wherein the fumes exhausted through the second exhaust passage is provided to flow to the exhaust space through a space between the connection rods.

### Claim 3 (depends on 1)

The apparatus of claim 1, wherein a length of the body in the vertical direction is provided to be larger than the first clearance and the second clearance.

### Claim 4 (depends on 1)

The apparatus of claim 1, wherein the fumes exhausted through the first exhaust passage and the fumes exhausted through the second exhaust passage are exhausted through the same exhaust space.

### Claim 5 (depends on 4)

The apparatus of claim 4, wherein an exhaust pipe in which a pump is installed is connected to the exhaust space, and
wherein an exhaust route from the first exhaust passage up to the exhaust pipe is provided to be shorter than an exhaust route from the second exhaust passage up to the exhaust pipe.

### Claim 6

An apparatus for treating a substrate, the apparatus comprising:
a liquid treating chamber configured to treat a substrate with a liquid;
a home port provided outside a treating unit of the liquid treating chamber; and
a nozzle unit supplying a treating liquid to a substrate positioned in the treating unit, and having a nozzle provided to be movable between a process location at which the treating unit performs the liquid-treating for the substrate and a waiting location of waiting in the home port,
wherein the home port includes:
a drain cup having an accommodation space accommodating the treating liquid ejected from the nozzle;
a housing provided to cover the drain cup and having an exhaust space which exhausts fumes generated from the treating liquid;
a first exhaust passage and a second exhaust passage through which the fumes generated from the treating liquid in the drain cup flows to the exhaust space are provided in the home port, wherein the second exhaust passage is positioned above the first exhaust passage, and
an insertion body having a through hole penetrated in a vertical direction,
wherein the exhaust space includes a first exhaust space and a second exhaust space, and
wherein the housing further includes:
an inner housing placed to cover the drain cup, and having the first exhaust space from the drain cup, and
an outer housing placed to cover the inner housing, and having the second exhaust space from the inner housing,
wherein the fumes which flow through the first exhaust passage are connected to the first exhaust space,
wherein the second exhaust passage is connected to the second exhaust space,
wherein the insertion body has a body,
wherein the body is placed at a location higher than the drain cup and lower than the upper wall of the outer housing,
wherein a first clearance between the body and the drain cup is provided as the first exhaust passage, and
wherein a second clearance between the body and the upper wall of the outer housing is provided as the second exhaust passage.

### Claim 7 (depends on 6)

The apparatus of claim 6, wherein an upper end of the inner housing is positioned at a location higher than the upper end of the drain cup, and
wherein a lower end of the body is supported by the upper end of the inner housing.

### Claim 8 (depends on 6)

The apparatus of claim 6, wherein a first exhaust pipe is connected to the first exhaust space,
wherein a second exhaust pipe is connected to the second exhaust space,
wherein the first exhaust pipe and the second exhaust pipe are connected to an integrated exhaust pipe, and
wherein a pump is installed in the integrated exhaust pipe.

### Claim 9 (depends on 1)

The apparatus of claim 1, wherein the nozzle unit includes:
a base block, and
a plurality of nozzle members coupled to the base block and having ejection ends.

### Claim 10

An apparatus for treating a substrate, the apparatus comprising:
a liquid treating chamber configured to treat a substrate with a liquid;
a home port provided outside a treating unit of the liquid treating chamber; and
a nozzle unit supplying a treating liquid to a substrate positioned in the treating unit, and having a nozzle provided to be movable between a process location at which the treating unit performs the liquid-treating for the substrate and a waiting location of waiting in the home port,
wherein the home port includes:
a drain cup having an accommodation space accommodating the treating liquid ejected from the nozzle,
a housing provided to cover the drain cup and having an exhaust space which exhausts fumes generated from the treating liquid, and
an insertion body placed between an upper wall of the housing and the drain cup in the housing,
wherein a first exhaust passage guiding fumes to the exhaust space is formed between the insertion body and the drain cup,
wherein a second exhaust passage guiding the fumes to the exhaust space is formed between the insertion body and the housing,
wherein the second exhaust passage is provided at a higher location than the first exhaust passage,
wherein an exhaust pipe in which a depressurization member is installed is connected to the exhaust space,
wherein an exhaust route from the first exhaust passage up to the exhaust pipe is provided to be shorter than an exhaust route from the second exhaust passage up to the exhaust pipe,
wherein the insertion body has a through hole penetrated in a vertical direction,
wherein the housing includes:
a lower body covering a side portion and a lower portion of the drain cup; and
an upper body positioned above the lower body, and
wherein the insertion body further includes:
a support base; and
connection rods connecting the insertion body and the support base,
wherein an upper end of the lower body is positioned to be higher than an upper end of the drain cup,
wherein a bottom of the support base is supported by the lower body,
wherein the upper body is supported by the support base, and
wherein fumes exhausted through the second exhaust passage is provided to flow to the exhaust space through a space between the connection rods.