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US 12,599,922 B2Granted
System and method for liquid dispense and coverage control
AssigneeTokyo Electron Limited
InventorsMirko Vukovic, Daniel Fulford, Anton J. Devilliers
Life of this patent
Estimating the term…
Abstract
Light can be used to monitor coating a liquid on a substrate. By directing the light to a spot on the substrate, when the liquid passes through the spot, some light will be reflected, while some light will be scattered. Monitoring this behavior can indicate whether a substrate has been successfully coated with the liquid, as well as identifying defects. Further, coating times can be monitored to make process adjustments.
Claims13
A method for dispensing liquid on a substrate, the method comprising:
- rotating a substrate on a substrate holder about an axis;
- dispensing a liquid on a working surface of the substrate while the substrate is being rotated on the substrate holder, rotation of the substrate causing the liquid to coat the working surface of the substrate progressing from a center portion of the substrate to an edge of the substrate;
- directing a first laser beam at an edge of the working surface of the substrate;
- directing a second laser beam at an interior portion of the working surface of the substrate;
- monitoring scattered light from the first laser beam directed at the edge of the working surface of the substrate and scattered light or reflected light from the second laser beam directed at the interior portion of the working surface of the substrate to identify a pattern of monitored light indicating that the liquid has reached the edge of the working surface of the substrate;
- identifying an actual coating time of the liquid beginning from initiation of dispensing the liquid on the working surface until the liquid reaches the edge of the working surface;
- and
- comparing the actual coating time of the liquid to an expected coating time of the liquid.
5 more elements
A method for dispensing liquid on a substrate, the method comprising:
- rotating a substrate on a substrate holder about an axis;
- dispensing a liquid on a working surface of the substrate while the substrate is being rotated on the substrate holder, rotation of the substrate causing the liquid to coat the working surface of the substrate progressing from a center portion of the substrate to an edge of the substrate;
- directing a first laser beam at an edge of the working surface of the substrate;
- directing a second laser beam at an interior portion of the working surface of the substrate;
- monitoring reflected light from the first laser beam directed at the edge of the working surface of the substrate and scattered light or reflected light from the second laser beam directed at the interior portion of the working surface of the substrate to identify a pattern of monitored light indicating that the liquid has reached the edge of the working surface of the substrate;
- identifying an actual coating time of the liquid beginning from initiation of dispensing the liquid on the working surface until the liquid reaches the edge of the working surface;
- and
- comparing the actual coating time of the liquid to an expected coating time of the liquid.
5 more elements
A method for dispensing liquid on a substrate, the method comprising:
- rotating a substrate on a substrate holder about an axis;
- dispensing a liquid on a working surface of the substrate while the substrate is being rotated on the substrate holder, rotation of the substrate causing the liquid to coat the working surface of the substrate progressing from a center portion of the substrate to an edge of the substrate;
- directing a laser beam at an edge of the working surface of the substrate;
- monitoring both scattered light from the laser beam and reflected light directed at the edge of the working surface of the substrate to identify a pattern of monitored light indicating that the liquid has reached the edge of the working surface of the substrate;
- identifying an actual coating time of the liquid beginning from initiation of dispensing the liquid on the working surface until the liquid reaches the edge of the working surface;
- and
- comparing the actual coating time of the liquid to an expected coating time of the liquid.
4 more elements
Dependencies are inferred from the claim text.