Wastewater treatment system and method for semiconductor fabrication process

A wastewater treatment method for a semiconductor fabrication process, the method comprising:

• processing wastewater discharged from a semiconductor process chamber to generate a wastewater with an increased solute concentration, comprising causing an ion exchange between the wastewater discharged from the semiconductor process chamber and a first treatment water in a first electrodialysis apparatus, wherein the wastewater discharged from the semiconductor process chamber repeatedly enters a chamber of the first electrodialysis apparatus directly from a wastewater tank via a wastewater inlet port and exits the chamber of the first electrodialysis apparatus directly back to the wastewater tank via a wastewater outlet port, and wherein the first treatment water repeatedly enters the chamber of the first electrodialysis apparatus directly from a first treatment water tank via a treatment water inlet port and exits the chamber of the first electrodialysis apparatus directly back to the first treatment water tank via a first treatment water outlet port,
• wherein the first electrodialysis apparatus comprises a bipolar membrane-anion-exchange membrane-cation-exchange membrane (BP-A-C) type electrodialysis apparatus in which a plurality of bipolar membranes, a plurality of anion-exchange membranes, and a plurality of cation-exchange membranes are alternately arranged with each other between an anode and a cathode of the first electrodialysis apparatus, wherein the wastewater discharged from the semiconductor process chamber is introduced into each of a plurality of spaces in contact with a surface of each of the plurality of cation-exchange membranes that is directed toward the cathode, and wherein the first treatment water is introduced into each of a plurality of spaces in contact with a surface of each of the plurality of cation-exchange membranes that is directed toward the anode and into each of a plurality of spaces in contact with a surface of each of the plurality of anion-exchange membranes that is directed toward the anode;
• and
• processing wastewater that comprises at least a portion of the wastewater with the increased solute concentration, comprising:
• circulating the wastewater that comprises at least a portion of the wastewater with the increased solute concentration in a second electrodialysis apparatus;
• circulating a second treatment water in the second electrodialysis apparatus;
• causing an ion exchange between the second treatment water and the wastewater circulating in the second electrodialysis apparatus;
• and
• combining a portion of the wastewater circulating in the second electrodialysis apparatus with the second treatment water.