Chip packaging method involving fabrication of wire bond and electroplated metal bonding pad through formation of metal gasket, passivation layer, metal seed layer, and photoresist
AssigneesChipmore Technology Corporation Limited, Hefei Chipmore Technology Co., Ltd.
InventorWenjie Huang
Life of this patent
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Abstract
The present invention provides a chip packaging structure and a chip packaging method. The chip packaging structure includes a substrate, a metal bonding pad disposed on the substrate and a metal wire, wherein the tail end of the metal wire is provided with a welding part, the welding part is welded to the metal bonding pad, the metal bonding pad is provided with a coating layer, and at least part of the welding part is located between the coating layer and the metal bonding pad. The present invention greatly improves a welding effect of the metal wire and the metal bonding pad, so that the welding of the metal wire and the metal bonding pad is more reliable and stable.
Claims8
A chip packaging method, comprising the following steps:
- preparing a metal bonding pad, and enabling a surface of the metal bonding pad to have a solder area and a wire bonding area;
- applying solder in the solder area;
- connecting a welding part at a tail end of a metal wire into the wire bonding area;
- and
- melting the solder by heating and enabling the solder to enter the wire bonding area, so as to form a coating layer wrapping the welding part,
- wherein the step of preparing the metal bonding pad comprises the steps of:
- providing a substrate, and sequentially preparing a metal gasket and a passivation layer on a surface of the substrate, the passivation layer being provided with a window exposing part of a surface of the metal gasket to outside;
- preparing a metal seed layer on the surface of the metal gasket and a surface of the passivation layer;
- preparing a first photoresist layer on a surface of the metal seed layer;
- removing the first photoresist layer at a predetermined position to form a metal bonding pad forming area at the position;
- and
- manufacturing the metal bonding pad in the metal bonding pad forming area by an electroplating method, and
- wherein after preparation of the metal bonding pad is completed, the chip packaging method further comprises the steps of:
- preparing a second photoresist layer covering the metal bonding pad;
- removing the second photoresist layer in the solder area on the surface of the metal bonding pad;
- applying the solder in the solder area by the electroplating method;
- and
- removing the remaining second photoresist layer on the surface of the metal bonding pad, so that the wire bonding area is exposed to outside.
Dependencies are inferred from the claim text.