Integrated circuit device

An integrated circuit device comprising:

• a first cell region and a second cell region spaced apart from each other in a first lateral direction on a substrate, the first cell region and the second cell region each comprising a plurality of cells arranged in a line along a second lateral direction, wherein the second lateral direction is perpendicular to the first lateral direction;
• an inter-cell isolation region extending lengthwise in the second lateral direction between the first cell region and the second cell region;
• a plurality of power lines crossing the first cell region, the inter-cell isolation region, and the second cell region, in the first lateral direction on a back side surface of the substrate, the plurality of power lines being parallel to each other;
• a plurality of dummy gate insulation lines on a front side surface of the substrate in the inter-cell isolation region, the plurality of dummy gate insulation lines intermittently extending in a straight line in the second lateral direction;
• a plurality of bridge insulating patterns respectively in contact with end portions of the plurality of dummy gate insulation lines in the inter-cell isolation region, the plurality of bridge insulating patterns overlapping the plurality of power lines in a vertical direction;
• and
• a plurality of via power rails in the inter-cell isolation region,
• wherein each of the plurality of via power rails passes through a bridge insulating pattern of a selected one of the plurality of bridge insulating patterns in the vertical direction and is connected to a selected one of the plurality of power lines.

An integrated circuit device comprising:

• a first cell region and a second cell region spaced apart from each other in a first lateral direction on a substrate, the first cell region and the second cell region each comprising a plurality of cells;
• an inter-cell isolation region between the first cell region and the second cell region on the substrate, the inter-cell isolation region extending lengthwise in a second lateral direction, wherein the second lateral direction is perpendicular to the first lateral direction;
• a plurality of gate lines extending lengthwise in the second lateral direction in each of the plurality of cells;
• a plurality of dummy gate insulation lines extending lengthwise in the second lateral direction in the inter-cell isolation region, the plurality of dummy gate insulation lines arranged at a constant pitch in the first lateral direction together with the plurality of gate lines;
• a plurality of power lines on a back side surface of the substrate, each power line comprising a portion vertically overlapping a cell boundary of each of cells arranged in one row extending in the first lateral direction, from among the plurality of cells, a portion vertically overlapping a cell boundary of cells arranged in another row, which extends in the first lateral direction and is adjacent to the one row, from among the plurality of cells, and a portion vertically overlapping the inter-cell isolation region;
• a plurality of bridge insulating patterns in contact with end portions of at least two dummy gate insulation lines, which are selected from the plurality of dummy gate insulation lines and are adjacent to each other in the first lateral direction in the inter-cell isolation region, the plurality of bridge insulation patterns having a width greater than a width of the plurality of dummy gate insulation lines in the first lateral direction, and the plurality of bridge insulating patterns overlapping the plurality of power lines in the vertical direction;
• and
• a plurality of via power rails, each via power rail passing through a selected one of the plurality of bridge insulating patterns in a vertical direction in the inter-cell isolation region, each via power rail being connected to a selected one of the plurality of power lines,
• wherein a length of each of the plurality of dummy gate insulation lines is less than a length of at least one of the plurality of gate lines in the second lateral direction.