Substrate transfer device and substrate processing apparatus having the same

A substrate transfer device comprising:

• an end-effector extending in a first direction and configured to support a substrate;
• an end-effector hand connected with one side in the first direction of the end-effector;
• a horizontal movement unit connected with the end-effector hand and configured to move the end-effector in the first direction;
• and
• a deflection sensing unit comprising a light emitting part and a light receiving part, which are respectively disposed at both sides of a movement path of the end-effector, and configured to sense deflection of the end-effector,
• wherein the horizontal movement unit comprises a support plate extending in the first direction to provide the movement path of the end-effector caused by running of the end-effector hand, and
• the light emitting part and the light receiving part are respectively supported by both sides in a second direction crossing the first direction of the support plate.