Stage and method of manufacturing stage

A method of manufacturing a stage comprising:

• spraying an insulator perpendicular to a front surface of a base material while moving parallel to the front surface,
• forming an insulating film including a first plurality of particles having flat surfaces parallel or approximately parallel to the front surface,
• spraying the insulator perpendicular to a corner surface while moving parallel to the corner surface,
• forming the insulating film including a second plurality of particles having flat surfaces parallel or approximately parallel to the corner surface,
• spraying the insulator perpendicular to a side surface of the base material while moving parallel to the side surface, and
• forming the insulating film including a third plurality of particles having flat surfaces parallel or approximately parallel to the side surface,
• wherein
• the corner surface is formed at a corner between the front surface and the side surface of the base material,
• at least one particle of the first plurality of particles has a surface which extends over and is in direct physical contact with the front surface and the corner surface to facilitate forming the insulating film, wherein the insulating film is continuous and uninterrupted over at least the front surface and the corner surface, and
• the spraying of the insulator on the front surface, the spraying of the insulator on the corner surface and the spraying of the insulator on the side surface are performed sequentially.