Method of forming conductive member and method of forming channel
AssigneeTokyo Electron Limited
InventorsKoji Akiyama, Chihiro Tamura, Hisashi Warashina
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AssigneeTokyo Electron Limited
InventorsKoji Akiyama, Chihiro Tamura, Hisashi Warashina
Estimating the term…
A method of forming conductive member includes: forming, on substrate, first portion containing first element constituting the conductive member to be obtained and second element causing eutectic reaction with the first element, and second portion containing third element constituting intermetallic compound with the second element; crystallizing primary crystals of the first element by adjusting temperature of the substrate after bringing the first portion into liquid phase state; growing crystal grains of the first element by diffusing the second element from the first portion into the second portion to increase ratio of the first element in crystal state to the first and second elements in the liquid phase state in the first portion while maintaining the temperature of the substrate at the same temperature; and turning the first portion, after completing diffusion of the second element into the second portion, into the conductive member having crystal grains of the first element.
A method of forming a conductive member, the method comprising:
Dependencies are inferred from the claim text.