MRAM device with self-aligned bottom electrodes

Abstract

A magnetic tunnel junction (MTJ) stack, where a vertical side surface of a bottom electrode of the MTJ stack is surrounded by an oxide, where the bottom electrode and the oxide are horizontally aligned. A magnetic tunnel junction (MTJ) stack, where a vertical side surface of a bottom electrode of the MTJ stack and a metal spacer below the bottom electrode is surrounded by an oxide, where an upper surface of the bottom electrode is horizontally aligned with a horizontal upper surface of the oxide, where a lower surface of the metal spacer is horizontally aligned with a horizontal lower surface of the oxide. Forming a metal spacer above and vertically aligned with a lower metal line surrounded by a dielectric, and forming a metal layer on the metal spacer and dielectric with a high temperature deposition of the metal layer, where the metal layer oxidizes.

Dependencies are inferred from the claim text.