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US 12,598,857 B2Granted
Imaging device including an electrode having a tantalum nitride layer and another layer
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsShunsuke Isono, Yuuko Tomekawa, Ryota Sakaida
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Abstract
An imaging device includes a photoelectric conversion film and an electrode. The photoelectric conversion film converts light to charge. The electrode collects the charge. The electrode includes two or more layers. The two or more layers include a first layer containing tantalum nitride. An uppermost layer among the two or more layers contains a metal nitride.
Claims18
An imaging device comprising:
- a photoelectric conversion film that converts light to charge;
- and
- an electrode that collects the charge, wherein:
- the electrode includes two or more conductive layers,
- the two or more conductive layers include a first layer containing tantalum nitride,
- an uppermost layer among the two or more conductive layers contains a metal nitride as a second layer different from the first layer, and
- the uppermost layer is always electrically connected to the first layer.
4 more elements
An imaging device comprising:
- a photoelectric conversion film that converts light to charge;
- and
- an electrode that collects the charge, wherein:
- the electrode includes an electrode body and an insulating film,
- the electrode body includes a second layer forming at least part of a top surface of the electrode and a first layer forming at least part of a bottom surface of the electrode,
- the insulating film is formed on the first layer, and
- the first layer always electrically contacts the second layer.
4 more elements
An imaging device, comprising:
- a photoelectric conversion film that converts light to charge;
- and
- an electrode that collects the charge, wherein:
- the electrode includes two or more layers,
- the two or more layers include a first layer containing tantalum nitride,
- an uppermost layer among the two or more layers contains a metal nitride,
- in a cross-section parallel to a thickness direction of the photoelectric conversion film, an angle formed between a side surface of the photoelectric conversion film and a bottom surface of the photoelectric conversion film is greater than or equal to 70° and less than or equal to 90°, and
- in the cross-section, at least part of the electrode is located outside the photoelectric conversion film in a lateral direction with respect to the side surface.
5 more elements
Dependencies are inferred from the claim text.