Semiconductor storage device and method of manufacturing semiconductor storage device
AssigneeKioxia Corporation
InventorShinya Arai
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AssigneeKioxia Corporation
InventorShinya Arai
Estimating the term…
A semiconductor storage device includes a stack, a columnar body, and a second conductive layer. The stack includes a plurality of first conductive layers and a plurality of insulating layers. In the stack, the plurality of first conductive layers and the plurality of insulating layers are alternately stacked one by one in a first direction. The second conductive layer is connected to the columnar body. The columnar body includes an insulating core, a memory film, and a semiconductor channel. The memory film is provided between the plurality of first conductive layers and the insulating core. The semiconductor channel is provided between the insulating core and the memory film. An upper surface of the insulating core is located lower than an upper end of the columnar body. The second conductive layer has a main body portion and a protrusion. The protrusion protrudes from the main body portion toward the upper surface of the insulating core, and extends in the first direction within the columnar body. The protrusion is in contact with the semiconductor channel on a bottom surface or a side surface of the protrusion.
A semiconductor storage device comprising:
Dependencies are inferred from the claim text.