Semiconductor structure, method for forming same and layout structure
AssigneeChangxin Memory Technologies, Inc.
InventorYi Tang
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AssigneeChangxin Memory Technologies, Inc.
InventorYi Tang
Estimating the term…
A method for forming a semiconductor structure includes the following: a substrate is provided, the substrate including a first area and a second area arranged in sequence in a second direction and T-shaped active pillars located in the first area and the second area and arranged in an array in a first direction and a third direction, the first, second and third directions being perpendicular to one another, and the first and second directions being parallel to a surface of the substrate; T-shaped gate structures located on surfaces of the T-shaped active pillars and bit line structures extending in the third direction are formed in the first area, a plurality of T-shaped gate structures located in the first direction being interconnected; and capacitor structures extending in the second direction is formed in the second area, the bit line structures and the capacitor structures being connected to the T-shaped gate structures.
A method for forming a semiconductor structure, comprising:
A semiconductor structure, at least comprising:
A semiconductor structure, at least comprising:
Dependencies are inferred from the claim text.