MEMS microphone

A microelectromechanical (MEMS) transducer comprising:

• a substrate;
• a moveable electrode supported by the substrate, wherein the moveable electrode comprises a porous plate and a plurality of fingers extending outward from an edge of the porous plate;
• and
• a pair of fixed electrodes supported by the substrate, each fixed electrode of the pair of fixed electrodes being configured as a bias electrode or as a sense electrode;
• wherein:
• the pair of fixed electrodes are disposed in a stacked arrangement;
• an end of the moveable electrode is configured for vibrational movement along the stacked arrangement during excitation of the moveable electrode;
• and
• the pair of fixed electrodes are laterally spaced apart from the end of the moveable electrode to establish a capacitance indicative of the vibrational movement.

A microelectromechanical (MEMS) transducer comprising:

• a substrate;
• a moveable electrode supported by the substrate;
• and
• a pair of fixed electrodes supported by the substrate, each fixed electrode of the pair of fixed electrodes being configured as a bias electrode or as a sense electrode;
• wherein:
• first and second fixed electrodes of the pair of fixed electrodes have positive and negative biases, respectively, with respect to the moveable electrode;
• the pair of fixed electrodes are disposed in a stacked arrangement;
• an end of the moveable electrode is configured for vibrational movement along the stacked arrangement during excitation of the moveable electrode;
• and
• the pair of fixed electrodes are laterally spaced apart from the end of the moveable electrode to establish a capacitance indicative of the vibrational movement.