Transducer and electronic device
AssigneeRohm Co., Ltd.
InventorsTakashi Naiki, Noriyuki Shimoji, Tomohiro Date, Kenji Gouda, Yurina Amamoto
Life of this patent
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Abstract
A transducer includes: a film support portion; a vibration film that is connected to the film support portion and capable of displacing in a thickness direction; a base material having an opposed surface that is opposed to the vibration film; and a first piezoelectric element that is provided with a pair of electrodes and a piezoelectric film sandwiched between the pair of electrodes, and is arranged on the vibration film, in which the transducer maintains a pressure in a space between the base material and the vibration film so as to keep displacement of the vibration film within a certain range.
Claims16
A transducer comprising:
- a film support portion;
- a vibration film that is connected to the film support portion and capable of displacing in a thickness direction;
- a base material having an opposed surface that is opposed to the vibration film to have a space formed therebetween, the opposed surface having an opening therein, the opening penetrating the base material to be in communication with the space, a width of the opening being smaller than a width of the film support portion;
- and
- a first piezoelectric element that is provided with a pair of electrodes and a piezoelectric film sandwiched between the pair of electrodes, and is arranged on the vibration film, wherein
- the transducer maintains a pressure in the space so as to keep displacement of the vibration film within a certain range.
Dependencies are inferred from the claim text.