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US 12,598,386 B2Granted
MEMS-based imaging devices
AssigneeMicrosoft Technology Licensing, LLC
InventorGritsko Perez Noguera
Life of this patent
Estimating the term…
Abstract
This document relates to devices employing imaging devices, such as cameras and improved camera performance. In one example the device includes an optical element and a sensing element configured to sense light passing through the optical element. This example includes a set of MEMS actuators configured to be individually selectively controlled to create six degrees of freedom (6DoF) movement between the sensing element and the optical element.
Claims20
A device, comprising:
- an optical element;
- a sensing element configured to sense light passing through the optical element;
- a processor configured to receive data from the sensing element;
- and,
- a set of micro electromechanical systems (MEMS) actuators extending from a fixed area to a moveable area that includes the sensing element and configured to be individually selectively controlled to create movement of the sensing element relative to the optical element and to convey the data between the sensing element and the processor.
2 more elements
A system, comprising:
- an optical element;
- a sensing element configured to sense light passing through the optical element;
- and,
- a set of MEMS actuators having shapes that approximate a rectangle and that lie in a common plane and are configured to be individually selectively controlled to change dimensions of the rectangle or cause the rectangle to rotate out of the common plane to collectively create six degrees of freedom (6DoF) movement between the sensing element and the optical element.
1 more element
A device, comprising:
- a semiconductor substrate processed to include a set of multiple independently controllable MEMS actuators extending from a fixed area to a central moveable area;
- and,
- individual MEMS actuators comprising a planar ribbon structure that includes a first elongate portion coupled to the fixed area, a second elongate portion that is generally parallel to the first elongate portion, a first switchback-shaped transition portion that extends between the first elongate portion and the second elongate portion, and a third elongate portion that is coupled to the central moveable area and is generally parallel to the second elongate portion and is coupled to the second elongate portion by a second switchback-shaped transition portion that extends between the second elongate portion and the third elongate portion.
Dependencies are inferred from the claim text.