Systems and methods for series-connected VCSEL array

A Vertical Cavity Surface Emitting Laser (VCSEL) array for generating a laser beam, comprising:

• an isolation layer, the isolation layer at least electrically semi-insulating, a bandgap energy level of the isolation layer higher than photon energy of the laser beam;
• a plurality of VCSEL sub-arrays formed in an area on the isolation layer and including at least a first sub-array and a second sub-array, the first sub-array comprising a plurality of VCSEL structures connected in parallel with a common cathode contact and a common anode contact, each VCSEL structure comprising a first reflector region over the isolation layer, a current and/or optical confining structure, an active region over the first reflector region, a second reflector region over the active region, and a first metal layer over and electrically connected to the second reflector region, first metal layers of the plurality of VCSEL structures of the first sub-array being physically connected, the first and second sub-arrays separated by an isolation structure;
• and
• a metal structure electrically connecting the common cathode contact of the first sub-array and a common anode contact of the second sub-array, the metal structure being made of a metallic material.

A method for forming a Vertical Cavity Surface Emitting Laser (VCSEL) array, comprising:

• forming an isolation layer, the isolation layer at least electrically semi-insulating;
• forming a plurality of VCSEL sub-arrays including at least a first sub-array and a second sub-array and in an area on the isolation layer, the first sub-array comprising a plurality of VCSEL structures connected in parallel with a common cathode contact and a common anode contact, each VCSEL structure comprising a first reflector region over the isolation layer, a current and/or optical confining structure, an active region over the first reflector region, a second reflector region over the active region, and a first metal layer over and electrically connected to the second reflector region, first metal layers of the plurality of VCSEL structures of the first sub-array being physically connected, the first and second sub-arrays separated by an isolation structure;
• and
• forming a metal structure by depositing a metallic material, the metal structure electrically connecting the common cathode contact of the first sub-array and a common anode contact of the second sub-array.