Process chambers having multiple cooling plates

A process chamber, comprising:

• a chamber body defining an interior volume therein, the chamber body having a view port side having an opening configured as a view port, a pump side having a pump port, and a shutter side opposite the view port side, wherein the pert view port side, the pump side, and the shutter side are all different sides of the chamber body;
• a first cooling plate coupled to the view port side and having one or more first coolant channels and having a first conduit disposed therein;
• a second cooling plate coupled to the pump side and having one or more second coolant channels and having a second conduit disposed therein;
• and
• a third cooling plate coupled to the shutter side and having one or more third coolant channels and having a third conduit disposed therein, wherein the first conduit extends to a first end of the second conduit and a second end of the second conduit extends to the third conduit.

A process chamber, comprising:

• a chamber body defining an interior volume therein, the chamber body having a first chamber wall on a view port side having an opening configured as a view port, a second chamber wall on a pump side having a pump port, and a third chamber wall on a shutter side opposite the view port side, wherein the view port side, the pump side, and the shutter side are all different sides of the chamber body;
• a first cooling plate coupled to the first chamber wall and having one or more first coolant channels and having a first conduit disposed therein;
• a second cooling plate coupled to the second chamber wall and having one or more second coolant channels and having a second conduit disposed therein;
• a third cooling plate coupled to the third chamber wall and having one or more third coolant channels and having a third conduit disposed therein, wherein the first conduit extends to the second conduit and the second conduit extends to the third conduit;
• a top plate coupled to an upper surface of the chamber body, wherein the top plate includes one or more coolant channels fluidly coupled to the first conduit;
• and
• a cryogenic pump coupled to the pump port.