Image enhancement in charged particle inspection
AssigneeASML Netherlands B.V.
InventorsHairong Lei, Wei Fang
Life of this patent
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Abstract
An improved systems and methods for generating a denoised inspection image are disclosed. An improved method for generating a denoised inspection image comprises acquiring an inspection image; generating a first denoised image by executing a first type denoising algorithm on the inspection image; and generating a second denoised image by executing a second type denoising algorithm on the first denoised image.
Claims13
A method for generating a denoised inspection image, comprising:
- acquiring an inspection image;
- generating a first denoised image by executing a first type denoising algorithm on the inspection image, wherein the first type denoising algorithm is a machine learning (ML) model trained to predict a denoised image of a training image of a pattern using a denoised reference image generated by executing a non-ML based denoising algorithm on a reference image of the pattern;
- and
- generating a second denoised image by executing a second type denoising algorithm on the first denoised image.
An apparatus for generating a denoised inspection image, the apparatus comprising:
- a memory storing a set of instructions;
- and
- at least one processor configured to execute the set of instructions to cause the apparatus to perform:
- acquiring an inspection image;
- generating a first denoised image by executing a first type denoising algorithm on the inspection image, wherein the first type denoising algorithm is a machine learning (ML) denoising model trained to predict a denoised image of a training image of a pattern using a denoised reference image generated by executing a non-ML based denoising algorithm on a reference image of the pattern;
- and
- generating a second denoised image by executing a second type denoising algorithm on the first denoised image.
A non-transitory computer readable medium that stores a set of instructions that is executable by at least on processor of a computing device to cause the computing device to perform a method for generating a denoised inspection image, the method comprising:
- acquiring an inspection image;
- generating a first denoised image by executing a first type denoising algorithm on the inspection image, wherein the first type denoising algorithm is a machine learning (ML) model trained to predict a denoised image of a training image of a pattern using a denoised reference image generated by executing a non-ML based denoising algorithm on a reference image of the pattern;
- and
- generating a second denoised image by executing a second type denoising algorithm on the first denoised image.
Dependencies are inferred from the claim text.