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US 12,596,309 B2Granted
Support for an optical element
AssigneeCarl Zeiss SMT GmbH
InventorRodolfo Guglielmi Rabe
Life of this patent
Estimating the term…
Abstract
A connection arrangement for connecting a first component and a second component of an imaging device for micro lithography, such as for using light in the extreme UV range (EUV), includes a connection unit having a first contact portion, a second contact portion and a coupling portion.
Claims20
A connection arrangement configured to connect first and second components of a microlithographic imaging device, the connection arrangement comprising:
- a connection unit, comprising:
- a first contact portion comprising first and second coupling regions, the second region being a coupling region distance from the first coupling region in a first direction;
- a second contact portion;
- and
- a coupling portion comprising a first end and a second end opposite the first end, wherein:
- the first contact portion is configured to contact the first component in an assembled state;
- the second contact portion is configured to contact the second component in the assembled state;
- at least in the assembled state, the first end of the coupling portion is connected to the first coupling region and the second end of the coupling portion is connected to the second coupling region so that the coupling portion couples the first and second contact portions;
- at least in the assembled state, the coupling portion is connected to the first contact portion between the first and second ends;
- the first contact portion and/or the coupling portion is configured so that, in the assembled state when a change in state from a first state to a second state with an increase in the coupling region distance, a movement component along a second direction is impressed upon the second contact portion;
- and
- the second direction runs across the first direction.
9 more elements
A method of connecting a first component and a second component of a microlithographic imaging device via a connection unit, the method comprising:
- bringing a first contact portion of the connection unit into contact with the first component in an assembled state;
- bringing a second contact portion of the connection unit into contact with the second component in the assembled state;
- arranging a first coupling region of the first contact portion and a second coupling region of the first contact portion at a coupling region distance from one another in a first direction;
- coupling the first contact portion and the second contact portion together, at least in the assembled state, via a coupling portion of the connection unit comprising a first end and an opposite second end, by virtue of the first end of the coupling portion being connected to the first coupling region and the second end of the coupling portion being connected to the second coupling region;
- and
- at least in the assembled state, connecting the coupling portion between the first end and the second end to the second contact portion,
- wherein:
- the first contact portion and/or the coupling portion, in the assembled state when a change in state occurs caused by thermal expansion from a first state to a second state with an increase in the coupling region distance, impresses a movement component along a second direction upon the second contact portion;
- and
- the second direction runs across the first direction.
7 more elements
Dependencies are inferred from the claim text.