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US 12,596,210 B2Granted
Multi-level structures and methods for manufacturing the same
AssigneeNIL Technology ApS
InventorsBrian Bilenberg, Tobias Hedegaard Bro
Life of this patent
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Abstract
The present disclosure describes techniques for fabricating a multi-level structure. For example, in accordance with some implementations, the disclosure describes techniques for fabricating a multi-level master from which optical elements can be replicated either directly or by way of a sub-master. The disclosure also describes multi-level optical elements and processes for making them.
Claims19
A method for manufacturing an optical element or a master having a multi-level structure, the method comprising:
- providing a substrate that includes a first substrate portion and a second substrate portion, the first substrate portion being on the second substrate portion, and the first substrate portion having a composition that differs from a composition of the second substrate portion;
- forming first trenches through a surface of the substrate, wherein the first trenches extend through the first substrate portion and partially into the second substrate portion,
- after forming the first trenches, depositing a mask on portions of the surface of the substrate;
- and
- subsequently forming second trenches through the surface of the substrate, wherein the second trenches are disposed in portions of the substrate on which the mask is not present,
- wherein a depth of the first trenches differs from a depth of the second trenches, and
- wherein forming the second trenches includes etching through the first substrate portion, wherein the second substrate portion serves as an etch stop during formation of the second trenches.
4 more elements
A master for replicating sub-masters or optical elements, the master comprising:
- a substrate having a first substrate portion and a second substrate portion, the first substrate portion being on the second substrate portion, and the first substrate portion having a composition that differs from a composition of the second substrate portion,
- wherein the substrate has a multi-level structure including at least three different levels, wherein an upper surface of the first substrate portion defines a first one of the levels, a surface in a same plane as a boundary between the first and second substrate portions defines a second one of the levels, and a surface in a plane between upper and lower surfaces of the second substrate portion defines a third one of the levels,
- wherein the surface that defines the second one of the levels is a bottom of a first trench that extends entirely through the first substrate portion, and
- wherein the surface that defines the third one of the levels is a bottom of a second trench that extends entirely through the first substrate portion and Partially through the second substrate portion.
1 more element
An optical element comprising:
- a substrate having a first substrate portion and a second substrate portion, the first substrate portion being on the second substrate portion, and the first substrate portion having a composition that differs from a composition of the second substrate portion,
- wherein the substrate has a multi-level structure including at least three different levels, wherein an upper surface of the first substrate portion defines a first one of the levels, a surface in a same plane as a boundary between the first and second substrate portions defines a second one of the levels, and a surface in a plane between upper and lower surfaces of the second substrate portion defines a third one of the levels,
- wherein the surface that defines the second one of the levels is a bottom of a first trench that extends through the first substrate portion, and
- wherein the surface that defines the third one of the levels is a bottom of a second trench that extends through the first substrate portion and partially through the second substrate portion.
1 more element
Dependencies are inferred from the claim text.