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US 12,596,102 B2Granted
Resonator structure for mass sensing
AssigneeQorvo US, Inc.
InventorJames Webster
Life of this patent
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Abstract
A solid mount resonator sensor has a substrate. An anti-reflector stack is disposed proximate the substrate. The anti-reflector stack includes one or more acoustic interference layers. A first electrode is disposed proximate the anti-reflector stack. A second electrode having a first surface facing towards the first electrode and an opposing second surface facing away from the first electrode. A substantially quarter-wave piezoelectric material layer is disposed between the first and second electrodes.
Claims22
A solid mount resonator sensor, comprising:
- a substrate;
- an anti-reflector stack disposed proximate the substrate, the anti-reflector stack comprising one or more acoustic interference layers;
- an active region, comprising;
- a first electrode disposed proximate and incorporated into the anti-reflector stack;
- a second electrode having a first surface facing towards the first electrode and an opposing second surface facing away from the first electrode;
- a quarter-wave piezoelectric material layer disposed between the first and second electrodes;
- and
- a functionalization material arranged over the active region;
- wherein the anti-reflector stack causes substantially no dampening at a fundamental resonance frequency and causes little or no acoustic energy to be delivered to a non-sensing side of the solid mount resonator sensor.
6 more elements
A resonator sensor system comprising:
- a solid mount resonator comprising:
- a substrate;
- an anti-reflector stack disposed proximate the substrate, the anti-reflector stack comprising one or more acoustic interference layers;
- an active region, comprising;
- a first electrode disposed proximate and incorporated into the anti-reflector stack;
- a second electrode having a first surface facing towards the first electrode and an opposing second surface facing away from the first electrode;
- and
- a quarter-wave piezoelectric material layer disposed between the first and second electrodes;
- and
- a functionalization material arranged over the active region;
- actuation circuitry configured to drive the solid mount resonator into an oscillating motion;
- measurement circuitry configured to measure one or more resonator output signals representing a resonance characteristic of the oscillating motion of the solid mount resonator;
- and
- a controller operatively coupled to the actuation circuitry and the measurement circuitry;
- wherein the anti-reflector stack causes substantially no dampening at a fundamental resonance frequency and causes little or no acoustic energy to be delivered to a non-sensing side of the solid mount resonator.
12 more elements
A solid mount resonator sensor, comprising:
- a substrate;
- an anti-reflector stack disposed proximate the substrate, the anti-reflector stack comprising:
- one or more acoustic interference layers;
- an active region, comprising;
- a first electrode incorporated into the anti-reflector stack;
- a second electrode having a first surface facing towards the first electrode and an opposing second surface facing away from the first electrode;
- and
- a quarter-wave piezoelectric material layer disposed between the first and second electrodes;
- and
- a functionalization material arranged over the active region;
- wherein the anti-reflector stack causes substantially no dampening at a fundamental resonance frequency and causes little or no acoustic energy to be delivered to a non-sensing side of the solid mount resonator sensor.
8 more elements
Dependencies are inferred from the claim text.