Back to results
US 12,595,794 B2Granted
Fluid control device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKenjiro Okaguchi, Hiroki Achiwa
Life of this patent
Estimating the term…
Abstract
A fluid control device includes a piezoelectric pump, a piezoelectric pump, a container, and a control unit. The piezoelectric pumps and are connected in series. The piezoelectric pump is an upstream-side pump, and the piezoelectric pump is a downstream-side pump. The control unit controls driving of the piezoelectric pumps. The control unit makes the driving start timing of the piezoelectric pump on an upstream side earlier than the driving start timing of the piezoelectric pump on a downstream side.
Claims16
A fluid control device comprising:
- a first pump having a first hole and a second hole and configured to move a fluid between the first hole and the second hole;
- a second pump having a third hole and a fourth hole and configured to move a fluid between the third hole and the fourth hole;
- a container;
- a first communicating path communicating with the second hole and the third hole;
- a second communicating path communicating with the fourth hole and the container;
- and
- a first control unit configured to control driving of the first pump and the second pump,
- a valve provided in the second communicating path and configured to switch between opening the second communicating path to outside and closing the second communicating path from the outside;
- and
- a second control unit configured to control opening and closing of the valve,
- wherein the first control unit starts or stops driving of the first pump and the second pump,
- wherein the first control unit makes a driving start timing of an upstream-side pump with respect to the fluid earlier than a driving start timing of a downstream-side pump with respect to the fluid, the upstream-side pump being one of the first pump and the second pump, the downstream-side pump being another one of the first pump and the second pump, and
- wherein the second control unit starts closing the valve at the driving start timing of the upstream-side pump and starts opening the valve when at least the first pump or the second pump stops.
10 more elements
Dependencies are inferred from the claim text.