Fluid control device
AssigneeMurata Manufacturing Co., Ltd.
InventorsNobuhira Tanaka, Yutoku Kawabata, Hiroki Achiwa
Life of this patent
Estimating the term…
Abstract
A fluid control device includes a pump and an outer housing containing the pump. The outer housing has a first outer wall that forms an internal space on a flat plate side of the pump and that has a through hole allowing the internal space and an external space to communicate with each other. The first outer wall includes an outer wall main plate facing a piezoelectric element, and a side plate that is connected to the outer wall main plate and that has the through hole. The outer wall main plate has a higher thermal conductivity than that of a second outer wall.
Claims14
A fluid control device comprising:
- a pump;
- and
- an outer housing containing the pump, wherein
- the pump includes a first flat plate, a second flat plate, and a piezoelectric element, the second flat plate being disposed so as to face the first flat plate with a space between the first flat plate and the second flat plate, the second flat plate forming a pump chamber together with the first flat plate, and the piezoelectric element being disposed on a surface of the first flat plate on a side opposite to the pump chamber,
- the outer housing has a first outer wall and a second outer wall, the first outer wall forming a first internal space on a side of the first flat plate and having a first through hole allowing the first internal space and an external space to communicate with each other, and the second outer wall forming a second internal space on a side of the second flat plate and having a second through hole allowing the second internal space and the external space to communicate with each other,
- the first outer wall has a first outer wall main plate and a first side plate, the first outer wall main plate facing the piezoelectric element, and the first side plate being connected to the first outer wall main plate and having the first through hole, and
- the first outer wall main plate is higher in thermal conductivity than the second outer wall,
- wherein the first outer wall main plate includes a metal portion and a resin portion,
- wherein the metal portion is larger than the piezoelectric element and overlaps the piezoelectric element in plan view,
- wherein a portion of the first outer wall main plate not overlapping the piezoelectric element in plan view comprises the resin portion,
- wherein the second internal space is formed between the second flat plate and the second outer wall, and
- wherein a flat plate through hole is formed in the second flat plate.
Dependencies are inferred from the claim text.