# US 12,595,788 B2 · Actuator, pump, method for manufacturing actuator > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,595,788 B2 - Document ID: US12595788B2 - Status: Granted - Kind: B2 - Application number: 18/485,450 - Filed: 2023-10-12 - Published: 2024-02-08 - Granted: 2026-04-07 - Earliest claimed: 2021-04-27 - Assignees: Murata Manufacturing Co., Ltd. - Applicants: Murata Manufacturing Co., Ltd. - Inventors: Nobuhira Tanaka - Web page: https://patentgrep.com/patent/US12595788B2 ## CPC - F04B 43/046: {with piezoelectric drive} - F04B 43/02: having plate-like flexible members, e.g. diaphragms (F04B43/14 takes precedence) - F04B 43/04: Pumps having electric drive - F04B 45/04: having plate-like flexible members, e.g. diaphragms (F04B45/10 takes precedence) - F04B 45/047: Pumps having electric drive - H10N 30/02: Forming enclosures or casings - H10N 30/2047: {Membrane type} - H10N 30/88: Mounts; Supports; Enclosures; Casings - F04B: POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS (machines for liquids, or pumps, of rotary-piston or oscillating-piston type F04C; non-positive-displacement pumps F04D; pumping of fluid by direct contact of another fluid or by using inertia of fluid to be pumped F04F) - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract An actuator includes a vibrating member, a frame, and an adhesive. The vibrating member includes a main surface and a main surface, and a piezoelectric element is mounted on the main surface. The vibrating member has a plate shape and includes an outer edge portion having a greater shape than the piezoelectric element in plan view and not abutting the piezoelectric element). The frame has an outer edge shape that is smaller than the vibrating member. The frame and the main surface in the outer edge portion of the vibrating member are adhered to each other with the adhesive. In plan view, the outer edge shape of the frame is smaller than an outer shape of the outer edge portion of the vibrating member. The frame includes a projection portion that projects outward from part of an outer edge. ## Claims ### Claim 1 An actuator comprising: a plate-shaped vibrating member including a first main surface and a second main surface, and an outer edge portion, wherein a piezoelectric element is mounted on at least one of the first main surface and the second main surface, and the outer edge portion has a greater shape than the piezoelectric element in plan view and does not abut the piezoelectric element; a frame superposed on a portion of the vibrating member; and an adhesive configured to adhere the frame and the first main surface or the second main surface in the outer edge portion of the vibrating member to each other; wherein, the frame includes a projection portion projecting outward from a part of an outer edge of the frame, and the frame defines an opening. ### Claim 2 (depends on 1) The actuator according to claim 1, wherein the outer edge of the frame is an octagon in plan view, and the projection portion is provided in a side surface being different from a side surface forming a longest side in the octagon. ### Claim 3 (depends on 1) The actuator according to claim 1, further comprising a plurality of projection portions including the projection portion, wherein the plurality of projection portions at least include a first projection portion having a first shape and a second projection portion having a second shape that is different from the first shape, and the first projection portion is disposed at a specific position at the outer edge. ### Claim 4 (depends on 1) The actuator according to claim 1, wherein the frame includes only one projection portion. ### Claim 5 (depends on 1) The actuator according to claim 1, wherein the projection portion is disposed in a space surrounded by phantom lines extending from a first connection side surface and a second connection side surface connected to both ends of a side surface where the projection portion is provided. ### Claim 6 (depends on 1) The actuator according to claim 1, further comprising: an electrode pattern connected to the piezoelectric element, wherein the electrode pattern includes an inner connecting portion superposed on the piezoelectric element or the outer edge portion in plan view and an outer terminal connected to an outside, and wherein the outer terminal has a shape projecting further outward than an outer edge of the vibrating member in the plan view, and, in plan view, the projection portion and a portion where the outer terminal projects outward are disposed at positions spaced from each other with the frame interposed therebetween. ### Claim 7 (depends on 1) A pump comprising: the actuator according to claim 1; and a lid member having a plate shape and facing the vibrating member with the frame interposed therebetween. ### Claim 8 (depends on 1) A method for manufacturing the actuator according to claim 1, comprising cutting a plurality of frames according to claim 1 out of a mother board comprising a metal extended in a predetermined direction such that positions of the respective projection portion of each of the respective frames are the same. ### Claim 9 (depends on 2) The actuator according to claim 2, further comprising a plurality of projection portions including the projection portion, wherein the plurality of projection portions at least include a first projection portion having a first shape and a second projection portion having a second shape that is different from the first shape, and the first projection portion is disposed at a specific position at the outer edge. ### Claim 10 (depends on 2) The actuator according to claim 2, wherein the frame includes only one projection portion. ### Claim 11 (depends on 2) The actuator according to claim 2, wherein the projection portion is disposed in a space surrounded by phantom lines extending from a first connection side surface and a second connection side surface connected to both ends of a side surface where the projection portion is provided. ### Claim 12 (depends on 3) The actuator according to claim 3, wherein the projection portion is disposed in a space surrounded by phantom lines extending from a first connection side surface and a second connection side surface connected to both ends of a side surface where the projection portion is provided to the side surface where the projection portion is provided and the side surface where the projection portion is provided. ### Claim 13 (depends on 4) The actuator according to claim 4, wherein the projection portion is disposed in a space surrounded by phantom lines extending from a first connection side surface and a second connection side surface connected to both ends of a side surface where the projection portion is provided. ### Claim 14 (depends on 2) The actuator according to claim 2, further comprising: an electrode pattern connected to the piezoelectric element, wherein the electrode pattern includes an inner connecting portion superposed on the piezoelectric element or the outer edge portion in plan view and an outer terminal connected to an outside, and wherein the outer terminal has a shape projecting further outward than an outer edge of the vibrating member in the plan view, and, in plan view, the projection portion and a portion where the outer terminal projects outward are disposed at positions spaced from each other with the frame interposed therebetween. ### Claim 15 (depends on 3) The actuator according to claim 3, further comprising: an electrode pattern connected to the piezoelectric element, wherein the electrode pattern includes an inner connecting portion superposed on the piezoelectric element or the outer edge portion in plan view and an outer terminal connected to an outside, and wherein the outer terminal has a shape projecting further outward than an outer edge of the vibrating member in the plan view, and, in plan view, the projection portion and a portion where the outer terminal projects outward are disposed at positions spaced from each other with the frame interposed therebetween. ### Claim 16 (depends on 4) The actuator according to claim 4, further comprising: an electrode pattern connected to the piezoelectric element, wherein the electrode pattern includes an inner connecting portion superposed on the piezoelectric element or the outer edge portion in plan view and an outer terminal connected to an outside, and wherein the outer terminal has a shape projecting further outward than an outer edge of the vibrating member in the plan view, and, in plan view, the projection portion and a portion where the outer terminal projects outward are disposed at positions spaced from each other with the frame interposed therebetween. ### Claim 17 (depends on 5) The actuator according to claim 5, further comprising: an electrode pattern connected to the piezoelectric element, wherein the electrode pattern includes an inner connecting portion superposed on the piezoelectric element or the outer edge portion in plan view and an outer terminal connected to an outside, and wherein the outer terminal has a shape projecting further outward than an outer edge of the vibrating member in the plan view, and, in plan view, the projection portion and a portion where the outer terminal projects outward are disposed at positions spaced from each other with the frame interposed therebetween. ### Claim 18 (depends on 2) A pump comprising: the actuator according to claim 2; and a lid member having a plate shape and facing the vibrating member with the frame interposed therebetween. ### Claim 19 (depends on 3) A pump comprising: the actuator according to claim 3; and a lid member having a plate shape and facing the vibrating member with the frame interposed therebetween. ### Claim 20 (depends on 4) A pump comprising: the actuator according to claim 4; and a lid member having a plate shape and facing the vibrating member with the frame interposed therebetween.