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US 12,595,552 B2Granted
Module for flipping substrates in vacuum
AssigneeApplied Materials, Inc.
InventorsKarunakaran Nataraj, Sathiyamurthi Govindasamy, Suresh Palanisamy, Harish V. Penmethsa, Naresh Kumar Asokan
Life of this patent
Estimating the term…
Abstract
Apparatus and methods for flipping substrates in vacuum between PVD sputtering of each side for increasing throughput are provided herein. In some embodiments disclosed herein, a module of a processing system for flipping a substrate in vacuum is provided. The module includes a clamp assembly for securing the substrate, a motor assembly coupled to the substrate clamp assembly, for rotating the clamp assembly, a lift pin assembly, and a lift pin actuator for raising and lowering the lift pin assembly.
Claims13
A module of a processing system, comprising:
- a substrate clamp assembly, comprising:
- a first plate assembly comprising:
- a first plate;
- and
- a plurality of first substrate support elements coupled to the first plate, wherein each first substrate support element has a first substrate supporting surface;
- a second plate assembly comprising:
- a second plate;
- and
- a plurality of second substrate support elements coupled to the second plate, wherein each second substrate support element has a second substrate supporting surface, wherein the first substrate supporting surfaces and the second substrate supporting surfaces are aligned in a parallel orientation to a first plane;
- a plurality of guide-blocks comprising:
- a first plurality of guide-blocks coupled to the first plate;
- and
- a second plurality of guide-blocks coupled to the second plate;
- and
- a connector that biases the first plate towards the second plate;
- a motor assembly coupled to the substrate clamp assembly, and configured to rotate the substrate clamp assembly about a first axis that is parallel to the first plane, and orient the first substrate supporting surfaces and the second substrate supporting surfaces in a first orientation;
- a lift pin plate assembly comprising:
- a lift pin plate;
- a plurality of clamp assembly pins coupled to the lift pin plate;
- and
- a plurality of lift pins coupled to the lift pin plate, wherein the plurality of lift pins and the plurality of clamp assembly pins extend in a first direction;
- a lift pin actuator configured to position the plurality of lift pins in the first direction and within openings formed in the first plate when the first substrate supporting surfaces and the second substrate supporting surfaces are positioned in the first orientation, the lift pin actuator configured to move the lift pin plate assembly in a first direction to configure the clamp assembly in an open position and overcome the bias of the connector.
19 more elements
A processing system, comprising:
- a deposition chamber;
- a transfer chamber coupled to the deposition chamber;
- and
- a load lock chamber coupled to the transfer chamber, wherein the load lock chamber comprises a module, wherein the module comprises:
- a clamp assembly, wherein the clamp assembly comprises:
- a first plate;
- a second plate parallel to the first plate, the second plate movably coupled to the first plate in a direction perpendicular to a major plane of the first plate;
- a first plurality of guide-blocks coupled to the first plate;
- a second plurality of guide-blocks coupled to the second plate;
- a connector that biases the first plate towards the second plate;
- a first plurality of substrate support elements coupled to the first plate;
- and
- a second plurality of substrate support elements coupled to the second plate;
- an actuator configured to overcome the bias of the connector;
- a lift pin assembly disposed within the load lock chamber, the lift pin assembly comprising:
- a lift pin plate coupled to the actuator, wherein the actuator is configured to move the lift pin plate in a first direction to configure the clamp assembly in an open position;
- a plurality of clamp assembly pins coupled to the lift pin plate;
- and
- a plurality of lift pins coupled to the lift pin plate;
- a motor assembly coupled to the clamp assembly of the module;
- one or more backstop plates coupled to the clamp assembly;
- and
- a plurality of sensors in communication with the module.
20 more elements
Dependencies are inferred from the claim text.