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US 12,595,549 B2Granted
Optical filter including a high refractive index material
AssigneeViavi Solutions Inc.
InventorsGeorg Ockenfuss, Markus Bilger, Marius Grigonis
Life of this patent
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Abstract
An optical filter including at least one of a high refractive index material and a low refractive index material; wherein the optical filter exhibits a reduced angle shift in at least one of a visible, near infrared, and an extreme ultraviolet wavelength is disclosed. A method of depositing a film is also disclosed.
Claims16
A method for depositing a film comprising:
- introducing, to a process chamber of a cathode sputter-deposition system, a first target including a high refractive index material having a refractive index that is 2.18 or higher at a wavelength of 550 nm;
- introducing hydrogen gas into the process chamber;
- sputtering the first target in the presence of hydrogen gas;
- depositing particles created from the sputtering of the first target onto a substrate to form a film;
- and
- after forming the film, annealing the film at a temperature ranging from greater than 90° C. to less than 300° C. to 350° C. for a time period ranging from 30 minutes to 24 hours,
- wherein after annealing the film exhibits increased transmission of light in near infrared wavelengths compared to a film formed by the same process except that the film is not annealed.
4 more elements
A method for depositing a film comprising:
- introducing, to a process chamber of a cathode sputter-deposition system, a first target including a high refractive index material having a refractive index that is 2.18 or higher at a wavelength of 550 nm;
- introducing hydrogen gas into the process chamber;
- sputtering the first target in the presence of hydrogen gas;
- depositing particles created from the sputtering of the first target onto a substrate to form a film;
- and
- after forming the film, annealing the film at a temperature ranging from greater than 90° C. to 280° C. for a time period ranging from 30 minutes to 24 hours,
- wherein after annealing the film exhibits increased transmission of light in near infrared wavelengths compared to a film formed by the same process except that the film is not annealed.
4 more elements
Dependencies are inferred from the claim text.