Compound introduction apparatus and compound introduction method
AssigneeCanon Kabushiki Kaisha
InventorsYoshinori Itoh, Tatsuaki Orihara, Shinichi Sakurada, Tsutomu Shiratori, Sachiko Yamauchi, Nobuyuki Kuwabara, Futoshi Hirose, Takeshi Okada
Life of this patent
Estimating the term…