Thermal spray material
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsYuji Kimura, Yasushi Takai, Shigeyuki Nakamura
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Abstract
This thermal spray material including composite particles containing an yttrium oxide and an ammonium yttrium fluoride complex salt is used to form a thermal spray film comprising yttrium oxyfluoride formed by thermal-spraying in the air. When the thermal spray film is formed through thermal-spraying in the air by using the thermal spray material of the present invention, the loss of fluorine from the thermal spraying material during thermal-spraying is reduced, and a thermal spray film containing yttrium oxyfluoride can be formed by controlling a composition, so that a thermal spray film having a desired composition, particularly a desired F/Y, can be easily formed.
Claims4
A thermal spray material comprising composite particles consisting of an yttrium oxide and NH4Y2F7 as crystal phases.
Dependencies are inferred from the claim text.