# US 12,594,646 B2 · Window logic for control of polishing process

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- Number: US 12,594,646 B2
- Document ID: US12594646B2
- Status: Granted
- Kind: B2
- Application number: 18/190,770
- Filed: 2023-03-27
- Published: 2023-12-28
- Granted: 2026-04-07
- Earliest claimed: 2022-06-22
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Volker Geissler; Benjamin Cherian
- Web page: https://patentgrep.com/patent/US12594646B2

## CPC

- B24B 49/04: involving measurement of the workpiece at the place of grinding during grinding operation
- B24B 37/013: Devices or means for detecting lapping completion
- B24B 51/00: Arrangements for automatic control of a series of individual steps in grinding a workpiece (if applicable to other machine tools, G05B takes precedence)
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS

## Abstract

A method of controlling a chemical mechanical polishing system includes receiving a respective time-varying test signal from an endpoint detection system for each of a plurality of test substrates, simultaneously visually displaying the plurality of time-varying test signals on a display with the plurality of time-varying test signals overlaid on each other in a graph. receiving user input selecting a box having a defined time range and defined signal value range, and receiving a selection of one from a preset group of boundary crossing logic functions to provide a selected boundary crossing logic function. During chemical mechanical polishing of a device substrate, the device substrate is monitored with the endpoint detection system to generate a time-varying signal and an endpoint determination can be based on whether the time-varying signal satisfies the selected boundary crossing logic function.

## Claims

### Claim 1

A method of controlling a chemical mechanical polishing system, comprising:
for each respective test substrate of a plurality of test substrates, receiving a respective time-varying test signal from an endpoint detection system during chemical mechanical polishing of the respective test substrate, thus providing a plurality of time-varying test signals;
simultaneously visually displaying the plurality of time-varying test signals from the plurality of test substrates on a display with the plurality of time-varying test signals overlaid on each other in a graph;
receiving user input selecting a box having a defined time range and defined signal value range;
through a visual user interface element, receiving a selection of one from a preset group of boundary crossing logic functions to provide a selected boundary crossing logic function;
during chemical mechanical polishing of a device substrate, monitoring the device substrate with the endpoint detection system to generate a time-varying signal;
evaluating whether the time-varying signal in the defined time range satisfies the selected boundary crossing logic function;
determining an endpoint based on whether the time-varying signal satisfies the selected boundary crossing logic function; and
halting the chemical mechanical polishing of the device substrate using the endpoint.

### Claim 2 (depends on 1)

The method of claim 1, wherein the preset group of boundary crossing logic functions includes i) entry through a left boundary and exit through a top boundary, ii) entry though a top boundary and exit through a bottom boundary, iii) entry though a top boundary and exit through a right boundary, iv) entry through a left boundary and exit through a bottom boundary, v) entry through a left boundary and exit through a right boundary, vi) entry through a bottom boundary and exit through a right boundary, and vii) entry though a bottom boundary and exit through a top boundary.

### Claim 3 (depends on 1)

The method of claim 1, comprising:
receiving user input selecting a plurality of boxes with each respective box defined by a respective time range and respective signal value range; and
through a visual user interface element, for each respective box receiving a selection of one from the preset group of boundary crossing logic functions to provide a respective selected boundary crossing logic function for the respective box.

### Claim 4 (depends on 3)

The method of claim 3, comprising:
for each respective box, evaluating whether the time-varying signal in the respective time range and respective signal value range satisfies the respective selected boundary crossing logic function for the respective box; and
determining the endpoint based on whether the time-varying signal satisfies the respective selected boundary crossing logic functions of the respective boxes.

### Claim 5

A method of controlling a chemical mechanical polishing system, comprising:
for each respective test substrate of a plurality of test substrates, receiving a respective time-varying test signal from an endpoint detection system during chemical mechanical polishing of the respective test substrate, thus providing a plurality of time-varying test signals;
simultaneously visually displaying the plurality of time-varying test signals from the plurality of test substrates on a display with the plurality of time-varying test signals overlaid on each other in a graph;
receiving user input selecting a box providing a defined time range and defined signal value range;
providing the plurality of time-varying test signals and the defined time range and defined signal value range to an algorithm and identifying by the algorithm a boundary crossing logic function in the defined time range and defined signal value range;
during chemical mechanical polishing of a device substrate, monitoring the device substrate with the endpoint detection system to generate a time-varying signal;
evaluating whether the time-varying signal in the defined time range satisfies the identified boundary crossing logic function;
determining an endpoint based on whether the time-varying signal satisfies the identified boundary crossing logic function; and
halting the chemical mechanical polishing of the device substrate using the endpoint.

### Claim 6 (depends on 5)

The method of claim 5, wherein the identified boundary crossing logic function is identified from a preset group of boundary crossing logic functions which includes i) entry through a left boundary and exit through a top boundary, ii) entry though a top boundary and exit through a bottom boundary, iii) entry though a top boundary and exit through a right boundary, iv) entry through a left boundary and exit through a bottom boundary, v) entry through a left boundary and exit through a right boundary, vi) entry through a bottom boundary and exit through a right boundary, and vii) entry though a bottom boundary and exit through a top boundary.

### Claim 7 (depends on 6)

The method of claim 6, wherein identifying by the algorithm the boundary crossing logic function comprises determining which boundary crossing logic function from the preset group of boundary crossing logic functions is satisfied by a largest number of the plurality of time-varying test signals.

### Claim 8 (depends on 6)

The method of claim 6, wherein identifying by the algorithm the boundary crossing logic function comprises determining which boundary crossing logic function from the preset group of boundary crossing logic functions is satisfied by the plurality of time-varying test signals.

### Claim 9 (depends on 5)

The method of claim 5, comprising receiving user input confirming selection of the boundary crossing logic function identified by the algorithm.

### Claim 10 (depends on 5)

The method of claim 5, further comprising generating by the algorithm an updated time range and updated signal value range.

### Claim 11

A method of controlling a chemical mechanical polishing system, comprising:
for each respective test substrate of a plurality of test substrates, receiving a respective time-varying test signal from an endpoint detection system during chemical mechanical polishing of the respective test substrate, thus providing a plurality of time-varying test signals;
simultaneously visually displaying the plurality of time-varying test signals from the plurality of test substrates on a display with the plurality of time-varying test signals overlaid on each other in a graph;
receiving user input selecting an initial box providing a defined time range and defined signal value range;
through a visual user interface element, receiving a selection of one from a preset group of boundary crossing logic functions to provide a selected boundary crossing logic function;
providing the plurality of time-varying test signals and the defined time range and defined signal value range to an algorithm and identifying by the algorithm an updated time range and/or an updated signal value range;
during chemical mechanical polishing of a device substrate, monitoring the device substrate with the endpoint detection system to generate a time-varying signal;
evaluating whether the time-varying signal in the updated time range satisfies the identified boundary crossing logic function;
determining an endpoint based on whether the time-varying signal satisfies the identified boundary crossing logic function; and
halting the chemical mechanical polishing of the device substrate using the endpoint.

### Claim 12 (depends on 11)

The method of claim 11, wherein identifying the updated time range and/or the updated signal value range by the algorithm comprises identifying the updated time range and/or the updated signal value range for which all of the plurality of time-varying test signals satisfy the boundary crossing logic function.

### Claim 13 (depends on 12)

The method of claim 12, wherein identifying the updated time range and/or the updated signal value range by the algorithm comprises identifying a minimum time range and/or a minimum updated signal value range for which all of the plurality of time-varying test signals satisfy the boundary crossing logic function.

### Claim 14

A computer-readable medium tangibly storing instructions that, when executed by one or more processors of a computing device, cause the one or more processors to perform operations comprising:
for each respective test substrate of a plurality of test substrates, receiving a respective time-varying test signal from an endpoint detection system during chemical mechanical polishing of the respective test substrate, thus providing a plurality of time varying test signals;
simultaneously visually displaying the plurality of time-varying test signals from the plurality of test substrates on a display with the plurality of time-varying test signals overlaid on each other in a graph;
receiving user input selecting a box having a defined time range and defined signal value range; and
through a visual user interface element, receiving a selection of one from a preset group of boundary crossing logic functions to provide a selected boundary crossing logic function;
providing the plurality of time-varying test signals and the defined time range and defined signal value range to an algorithm and identifying by the algorithm an updated time range and/or an updated signal value range;
during chemical mechanical polishing of a device substrate, monitoring the device substrate with the endpoint detection system to generate a time-varying signal;
evaluating whether the time-varying signal in the updated time range satisfies the identified boundary crossing logic function;
determining an endpoint based on whether the time-varying signal satisfies the selected boundary crossing logic function; and
halting the chemical mechanical polishing of the device substrate using the endpoint.

### Claim 15 (depends on 14)

The computer-readable medium of claim 14, wherein the identified boundary crossing logic function is identified from a preset group of boundary crossing logic functions which includes i) entry through a left boundary and exit through a top boundary, ii) entry though a top boundary and exit through a bottom boundary, iii) entry though a top boundary and exit through a right boundary, iv) entry through a left boundary and exit through a bottom boundary, v) entry through a left boundary and exit through a right boundary, vi) entry through a bottom boundary and exit through a right boundary, and vii) entry though a bottom boundary and exit through a top boundary.

### Claim 16 (depends on 15)

The computer-readable medium of claim 15, wherein the operations comprise:
for each respective box, evaluating whether the time-varying signal in the respective time range and respective signal value range satisfies the respective selected boundary crossing logic function for the respective box.

### Claim 17 (depends on 14)

The computer-readable medium of claim 14, wherein the operations comprise:
receiving user input selecting a plurality of boxes with each respective box defined by a respective time range and respective signal value range; and
through a visual user interface element, for each respective box receiving a selection of one from the preset group of boundary crossing logic functions to provide a respective selected boundary crossing logic function for the respective box.