Method and disk carrier for use in polishing glass substrate disks

A carrier for retaining glass substrates during polishing, comprising:

• a planar carrier body comprising a plurality of circular openings, each configured to receive a disk-shaped glass substrate;
• wherein the carrier body further comprises a slurry passage hole configured to facilitate passage of a polishing slurry from one side of the carrier body to the other side of the carrier body;
• wherein the carrier body comprises first grooves on a surface of the carrier body;
• wherein the carrier body is configured to be rotated relative to an adjacent polishing pad so that the glass substrates are polished;
• and
• wherein the first grooves are configured to facilitate a flow of the polishing slurry between the carrier body and the polishing pad during the polishing.

A method for polishing glass substrates using a carrier for retaining the glass substrates during polishing, the method comprising:

• providing the carrier comprising:
• a planar carrier body comprising a plurality of circular openings, each configured to receive a disk-shaped glass substrate;
• wherein the carrier body comprises first grooves on a top surface of the carrier body;
• wherein the carrier body comprises second grooves on a bottom surface of the carrier body;
• placing the carrier on a first polishing pad of a polishing machine;
• placing glass substrates within the circular openings of the carrier;
• placing a second polishing pad on the carrier;
• providing a polishing slurry on the carrier, wherein the first and second grooves facilitate a spreading of the polishing slurry;
• and
• rotating the carrier between the first and second polishing pads to polish the glass substrates,
• wherein the first and second grooves are configured to facilitate a spreading of the polishing slurry and to retain at least some of the polishing slurry near the glass substrates during the polishing.