Laser annealing apparatus and laser annealing method using the same

A laser annealing apparatus comprising:

• a plurality of lasers;
• a laser controller which controls emitting timings of a plurality of laser beams generated by the plurality of lasers;
• beam mixer optics which output a processing beam by combining the plurality of laser beams of which output timings are adjusted, the processing beam including:
• a first processing laser beam having a first pulse;
• a second processing laser beam having a second pulse following the first pulse;
• and
• a third processing laser beam having a third pulse following the second pulse;
• and
• focus optics which output the processing beam of which focus is adjusted,
• wherein a first peak of the first pulse is smaller than a second peak of the second pulse, and a third peak of the third pulse is smaller than the second peak, and
• the first pulse is spaced apart from the second pulse, and the second pulse and the third pulse partially overlap each other.