US 12,594,596 B2 · Microdroplet-based three-dimensional (3D) laser printing system and method

Abstract

A microdroplet-based three-dimensional (3D) laser printing system, which includes a laser beam subsystem, a transparent donor substrate, voxel arrays, and the receiver substrate. By irradiating the voxel array with a pulsed laser beam deriving from the laser beam subsystem through the transparent donor substrate, the voxel array is melted and driven away from the transparent donor substrate to generate the ejecting microdroplet array and then deposited onto the receiver substrate. The 3D microstructure is printed in parallel by sequentially irradiating the voxel array and controlling the depositing locations of microdroplet arrays onto the receiver substrate. The system can avoid the satellite microdroplets generating, improve the printing efficiency and resolution, and obtain a wide process window.

Claims10

Dependent claims

A microdroplet-based three-dimensional (3D) laser printing system, comprising a laser beam subsystem, a transparent donor substrate, a voxel array, a microdroplet array, and a receiver substrate;

wherein a pulsed laser beam emitting from the laser beam subsystem is focused on the voxel array through the transparent donor substrate;
the voxel array is melted and driven away from the transparent donor substrate, generating an ejecting microdroplet array;
the ejecting microdroplet arrays sequentially deposit on the receiver substrate to print a 3D microstructure in parallel, wherein the laser beam subsystem is configured to generate the pulsed laser beam and irradiate on the voxel array,
wherein the laser beam subsystem further comprises a scanning galvanometer and an unfocused field lens, and the pulsed laser beam irradiates onto the voxel array with a constant laser fluence in different locations by the scanning galvanometer and the unfocused field lens.

1 more element

A microdroplet-based 3D laser printing method, wherein a microdroplet-based 3D laser printing is performed by a microdroplet-based 3D laser printing system, wherein the microdroplet-based three-dimensional (3D) laser printing system comprises a laser beam subsystem;

a transparent donor substrate;
a voxel array;
a microdroplet array;
and a receiver substrate, wherein a pulsed laser beam emitting from the laser beam subsystem is focused on the voxel array through the transparent donor substrate, the voxel array is melted and driven away from the transparent donor substrate, generating an ejecting microdroplet array, the ejecting microdroplet arrays sequentially deposit on the receiver substrate to print a 3D microstructure in parallel, wherein the laser beam subsystem is configured to generate the pulsed laser beam and irradiate on the voxel array,
wherein the laser beam subsystem further comprises a scanning galvanometer and an unfocused field lens, and the pulsed laser beam irradiates onto the voxel array with a constant laser fluence in different locations by the scanning galvanometer and the unfocused field lens.

2 more elements

Dependencies are inferred from the claim text.

Microdroplet-based three-dimensional (3D) laser printing system and method

Life of this patent

Microdroplet-based three-dimensional (3D) laser printing system and method

Life of this patent

Abstract

Claims10