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US 12,594,580 B2Granted
Altering and enhancing resonator performances using free to fixed boundary ratio (FFBR) topology
AssigneeUniversity of Windsor
InventorsHaleh Nazemi, Arezoo Emadi
Life of this patent
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Abstract
A resonator and/or transducer comprising at least one deflectable membrane, a fixed substrate, and at least one cavity defined between the at least one deflectable membrane and the fixed substrate. A Free to Fixed Boundary Ratio (FFBR) of the deflectable membrane is selected to optimize a characteristic of the resonator and/or transducer, such as resonant frequency, displacement, operating voltage, electromechanical coupling coefficient, or mass sensitivity.
Claims20
A method comprising:
- determining a Free to Fixed Boundary Ratio (FFBR) of a reference device;
- determining a reference characteristic of the reference device;
- comparing the reference characteristic to a target characteristic;
- and
- fabricating a modified device that has a different FFBR than the FFBR of the reference device;
- wherein the FFBR of the modified device is selected to provide a modified characteristic of the modified device that is closer to the target characteristic than the reference characteristic is to the target characteristic;
- wherein the reference device and the modified device each have at least one deflectable membrane, a fixed substrate, and at least one cavity defined between the at least one deflectable membrane and the fixed substrate;
- and
- wherein the reference device and the modified device each comprise at least one of:
- a resonator and a transducer.
7 more elements
A device comprising:
- at least one deflectable membrane;
- a fixed substrate;
- and
- at least one cavity defined between the at least one deflectable membrane and the fixed substrate;
- wherein a Free to Fixed Boundary Ratio (FFBR) of the at least one membrane is selected to optimize a characteristic of the device;
- and
- wherein the device comprises at least one of:
- a resonator and a transducer.
5 more elements
Dependencies are inferred from the claim text.