Semiconductor device and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Fung Chang, Chin-Wei Liang, Sheng-Feng Weng, Ming-Yu Yen, Cheyu Liu, Hung-Chih Chen, Yi-Yang Lei, Ching-Hua Hsieh, Hung-Chou Liao
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