Semiconductor structure and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChing-Wen Chen, Ming-Che Ho, Hung-Jui Kuo
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChing-Wen Chen, Ming-Che Ho, Hung-Jui Kuo
Estimating the term…
A structure including a redistribution structure comprising dielectric layers and conductive layers alternately stacked is provided, wherein a dielectric layer among the dielectric layers of the redistribution structure comprises a first surface, a conductive layer among the conductive layers of the redistribution structure comprising a second surface, and the conductive layer comprises a wiring layer and a seed layer; and an under-bump metallization (UBM) layer comprises a third surface, a fourth surface opposite to the third surface, and a sidewall surface extending from the third surface to the fourth surface, wherein a portion of the seed layer is between the wiring layer and the UBM layer, and the UBM is in contact with the dielectric layer.
A structure, comprising:
A structure, comprising:
A structure, comprising:
Dependencies are inferred from the claim text.