Semiconductor structure with diamond heat dissipation and manufacturing method thereof
AssigneeHuawei Technologies Co., Ltd.
InventorsRan He, Huifang Jiao
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AssigneeHuawei Technologies Co., Ltd.
InventorsRan He, Huifang Jiao
Estimating the term…
Embodiments of this application provide a semiconductor structure, an electronic device, and a manufacture method for a semiconductor structure, and relate to the field of heat dissipation technologies for electronic products. An example semiconductor structure includes a semiconductor device, a bonding layer, a substrate, a conducting via, and a metal layer. The semiconductor device is disposed on an upper surface of the substrate by using the bonding layer. The metal layer is disposed on a lower surface of the substrate. The substrate includes a base plate, a groove formed on the base plate, and a diamond accommodated in the groove. The conducting via penetrates the substrate, the bonding layer, and at least a part of the semiconductor device, and is electrically connected to the metal layer. The groove bypasses the conducting via.
A semiconductor structure, comprising:
A manufacture method for a semiconductor structure, comprising:
Dependencies are inferred from the claim text.