Semiconductor device with metal spacers and method for fabricating the same
AssigneeNanya Technology Corporation
InventorKuo-Hui Su
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Abstract
The present application discloses a semiconductor device including a substrate, an active area in the substrate, a first plug positioned above the active area, second plugs positioned above the active area, metal spacers positioned above the first plug and the plurality of second plugs, and air gaps respectively positioned between the plurality of metal spacers. The active area includes a narrow portion having a first width and two side portions having a second width, wherein the narrow portion is disposed between the two side portions, and the first width is less than the second width from a top view.
Claims19
A semiconductor device, comprising:
- a substrate;
- an active area in the substrate, wherein the active area comprises a narrow portion having a first width and two side portions having a second width, wherein the narrow portion is disposed between the two side portions, and the first width is less than the second width from a top view;
- a first plug positioned above the active area;
- a plurality of second plugs positioned above the active area;
- a plurality of metal spacers positioned above the first plug and the plurality of second plugs;
- and
- a plurality of air gaps respectively positioned between the plurality of metal spacers.
Dependencies are inferred from the claim text.