Phase change multilayer heterostructure with multiple heaters

A structure comprising:

• horizontally aligned alternating layers of phase change material layers and dielectric encapsulated heater element layers, the alternating layers of phase change material layers and the dielectric encapsulated heater element layers are sandwiched between a first electrode and a second electrode, and a high voltage pulse to the dielectric encapsulated heater element layer forms filamentary heaters, wherein the dielectric layer comprises a dielectric constant greater than or equal to 5.0.

A method of forming a structure, the method comprising:

• forming alternating layers of phase change material layers and dielectric encapsulated heater element layers, the alternating layers of phase change material layers and the dielectric encapsulated heater element layers are sandwiched between a first electrode and a second electrode;
• and
• providing a high voltage pulse to the dielectric encapsulated heater element layer to form filamentary heaters, wherein the dielectric layer comprises a dielectric constant greater than or equal to 5.0.