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US 12,593,559 B2Granted
Organic/inorganic composite structure, method for manufacturing the same and sensing device
AssigneeNational Cheng Kung University
InventorsChia-Yun Chen, Jheng-Yi Li, Tsung-Yen Wu
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Abstract
An organic/inorganic composite structure includes a silicon substrate and a conductive polymer layer. The silicon substrate includes a plurality of microstructures disposed on a surface of the silicon substrate. The conductive polymer layer is disposed on the plurality of microstructures. A spaced distance is between the conductive polymer layer and the surface of the silicon substrate.
Claims19
An organic/inorganic composite structure, comprising:
- a silicon substrate comprising a plurality of microstructures disposed on a surface of the silicon substrate;
- and
- a conductive polymer layer disposed on the plurality of microstructures, wherein a spaced distance is between the conductive polymer layer and the surface of the silicon substrate.
A method for manufacturing an organic/inorganic composite structure, comprising:
- providing a silicon substrate, wherein the silicon substrate comprising a plurality of microstructures disposed on a surface of the silicon substrate;
- and
- forming a conductive polymer layer on the plurality of microstructures, wherein a spaced distance is between the conductive polymer layer and the surface of the silicon substrate.
Dependencies are inferred from the claim text.