Flexible inorganic microLED display device and method of manufacturing thereof

A method of manufacturing a flexible display device, the method comprising:

• bonding at least one silicon die to at least one including and one or more display elements to a first handler substrate;
• depositing a flexible layer over the display elements and the at least one silicon die to form a display device structure, wherein and a first device structure surface comprising comprises a top surface of the flexible layer;
• bonding the display device structure to a second handler substrate at the first device structure surface;
• depositing at least one optical stress buffer layer on a bottom surface of the flexible layer, wherein a second device structure surface opposite to the first device structure surface comprises the bottom surface of the flexible layer;
• depositing a first interconnect layer on the optical stress buffer layer;
• and
• separating the display device structure from the first handler substrate, subsequent to the depositing the flexible layer.