Stacked fork sheet devices
AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Julien Frougier, Brent A. Anderson, Chen Zhang
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AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Julien Frougier, Brent A. Anderson, Chen Zhang
Estimating the term…
A semiconductor structure is provided that includes a first pair of stacked devices located in a first active device region and a second pair of stacked devices located in a second active device region. Each stacked device of the pair of stacked devices includes a second field effect transistor (FET) stacked over a first FET, and within each active device region the pair of stacked devices is separated by an inter-device dielectric pillar. A local interconnect structure is located in a non-active device region that is positioned between the first and second active device regions. The local interconnect structure can be connected to a back side power rail and a source/drain region of one of the second FETs, or connected to a front side signal line and a source/drain region of one of the first FETs.
A semiconductor structure comprising:
A semiconductor structure comprising:
Dependencies are inferred from the claim text.