Light source apparatus
AssigneeUshio Denki Kabushiki Kaisha
InventorYusuke Teramoto
Life of this patent
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Abstract
A light source apparatus, in which an energy beam transforms a liquid raw material into plasma to extract radiation, includes a rotation body, a raw material supply section, and an electric field applying section. The rotation body is disposed at a position onto which the energy beam is incident. The raw material supply section supplies the liquid raw material to the rotation body. The electric field applying section is set to a potential different from a potential of the liquid raw material that has been supplied to the rotation body, and applies an electric field to a plasma generation area in which plasma is to be generated by irradiation of the energy beam.
Claims21
A light source apparatus, in which an energy beam transforms a liquid raw material into plasma via a Laser Produced Plasma (LPP) method to extract radiation, the light source apparatus comprising:
- a rotation body including a plasma generation area onto which the energy beam is incident;
- a raw material supply section connected to the rotation body for supplying the liquid raw material to the rotation body;
- and
- an electric field applying section including a first element that is electrically grounded and a second element located near the first element and connected to an external voltage source, the electric field applying section setting a first potential different from a second potential of the liquid raw material that has been supplied to the rotation body by applying an electric field to the plasma generation area in which plasma is to be generated by irradiation of the energy beam.
A light source apparatus for extracting radiation by transforming a liquid raw material into plasma, comprising:
- an energy beam source for emitting energy beam;
- a rotation body electrically grounded and including a plasma generation area where the liquid raw material and the energy beam are received for generating plasma;
- and
- an electric field applying section including a conductor connected to an external voltage source and located over the rotation body and across the plasma generation area for setting a first potential different from a second potential of the liquid raw material by applying an electric field to the plasma generation area while the energy beam is emitted so as to improve lumen efficiency of the plasma.
A light source apparatus for extracting radiation by transforming a liquid raw material into plasma, comprising:
- an energy beam source for emitting energy beam;
- a rotation body including a plasma generation area where liquid raw material and the energy beam are received for generating plasma;
- a raw material supply section connected to the rotation body for supplying the liquid raw material to the plasma generation area on the rotation body;
- a chamber body for housing the rotation body within the chamber body;
- an external voltage source for providing a predetermined voltage;
- and
- an electric field applying section including a first element that is electrically grounded and a second element located near the first element and connected to the external voltage source, the electric field applying section for setting a first potential different from a second potential of the liquid raw material by applying an electric field to the plasma generation area while the energy beam is emitted so as to improve lumen efficiency of the plasma.
Dependencies are inferred from the claim text.